JPS62292391A - 無塵室用搬送ロボット - Google Patents

無塵室用搬送ロボット

Info

Publication number
JPS62292391A
JPS62292391A JP13562986A JP13562986A JPS62292391A JP S62292391 A JPS62292391 A JP S62292391A JP 13562986 A JP13562986 A JP 13562986A JP 13562986 A JP13562986 A JP 13562986A JP S62292391 A JPS62292391 A JP S62292391A
Authority
JP
Japan
Prior art keywords
dust
object storage
outside
storage section
drive unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13562986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH055640B2 (enExample
Inventor
輝雄 浅川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP13562986A priority Critical patent/JPS62292391A/ja
Publication of JPS62292391A publication Critical patent/JPS62292391A/ja
Publication of JPH055640B2 publication Critical patent/JPH055640B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
JP13562986A 1986-06-11 1986-06-11 無塵室用搬送ロボット Granted JPS62292391A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13562986A JPS62292391A (ja) 1986-06-11 1986-06-11 無塵室用搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13562986A JPS62292391A (ja) 1986-06-11 1986-06-11 無塵室用搬送ロボット

Publications (2)

Publication Number Publication Date
JPS62292391A true JPS62292391A (ja) 1987-12-19
JPH055640B2 JPH055640B2 (enExample) 1993-01-22

Family

ID=15156274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13562986A Granted JPS62292391A (ja) 1986-06-11 1986-06-11 無塵室用搬送ロボット

Country Status (1)

Country Link
JP (1) JPS62292391A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241889A (ja) * 1988-07-29 1990-02-13 Toshiba Corp クリーンロボット

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS6294291A (ja) * 1985-10-21 1987-04-30 フアナツク株式会社 産業用ロボツトの防塵構造

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5924292U (ja) * 1982-08-05 1984-02-15 東京エレクトロン株式会社 腕状機構
JPS6294291A (ja) * 1985-10-21 1987-04-30 フアナツク株式会社 産業用ロボツトの防塵構造

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0241889A (ja) * 1988-07-29 1990-02-13 Toshiba Corp クリーンロボット

Also Published As

Publication number Publication date
JPH055640B2 (enExample) 1993-01-22

Similar Documents

Publication Publication Date Title
JP4975238B2 (ja) 基板を移送するためのシステム
KR102701372B1 (ko) 반도체 시스템의 습도 제어
CN1849251B (zh) 通过架空式升降机运输车从单一轨道位置对储料架一个或多个水平位置的存取
JP2618210B2 (ja) 加圧密閉式可搬容器に対応する自動組立／分解装置
JP4344593B2 (ja) ミニエンバイロメント装置、薄板状物製造システム及び清浄容器の雰囲気置換方法
KR20010015207A (ko) 기판운반용기
JPH06199379A (ja) 偏平物品の収容箱
US5842917A (en) Automated manufacturing plant for semiconductor devices
CN110391162A (zh) 搬送机构
EP1096550B1 (en) Improved semiconductor manufacturing system
GB2126710A (en) Storage case to prevent dust contamination
JPS62292391A (ja) 無塵室用搬送ロボット
JPH07122616A (ja) 半導体製造装置
JP2008100805A (ja) 基板保管庫
JP3364294B2 (ja) 搬送装置および搬送方法
JPH11199007A (ja) カセットの搬送方法及び処理設備
JPS6222830B2 (enExample)
JPH072316B2 (ja) 無塵室用搬送ロボットによる搬送方法
JP4483012B2 (ja) 局所浄化方法
JPH07117809A (ja) 真空保管庫
JPS60206017A (ja) 清浄搬送システム
CN220400535U (zh) 半导体工艺系统
JPS6222829B2 (enExample)
JP2515003B2 (ja) クリ―ンチュ―ブ装置
KR100627016B1 (ko) 반도체 제조를 위한 크린룸