JPS6222829B2 - - Google Patents
Info
- Publication number
- JPS6222829B2 JPS6222829B2 JP16213978A JP16213978A JPS6222829B2 JP S6222829 B2 JPS6222829 B2 JP S6222829B2 JP 16213978 A JP16213978 A JP 16213978A JP 16213978 A JP16213978 A JP 16213978A JP S6222829 B2 JPS6222829 B2 JP S6222829B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- intake port
- blower
- dust
- air intake
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 2
- 230000032258 transport Effects 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16213978A JPS5587649A (en) | 1978-12-26 | 1978-12-26 | Conveyor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16213978A JPS5587649A (en) | 1978-12-26 | 1978-12-26 | Conveyor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5587649A JPS5587649A (en) | 1980-07-02 |
| JPS6222829B2 true JPS6222829B2 (enExample) | 1987-05-20 |
Family
ID=15748770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16213978A Granted JPS5587649A (en) | 1978-12-26 | 1978-12-26 | Conveyor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5587649A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60127996A (ja) * | 1983-12-15 | 1985-07-08 | 松下電器産業株式会社 | 工業用ロボツトの塵埃飛散防止装置 |
-
1978
- 1978-12-26 JP JP16213978A patent/JPS5587649A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5587649A (en) | 1980-07-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6162739A (ja) | クリ−ントンネル | |
| JPH11222122A (ja) | 分岐軌道を備えた搬送設備 | |
| JPH02153546A (ja) | 半導体の無塵化製造装置 | |
| CN110391162A (zh) | 搬送机构 | |
| US5842917A (en) | Automated manufacturing plant for semiconductor devices | |
| JPS6222830B2 (enExample) | ||
| JPS6222829B2 (enExample) | ||
| KR100374085B1 (ko) | 수송 장치 | |
| JPH11191582A (ja) | カセット搬送システム | |
| JPS62292391A (ja) | 無塵室用搬送ロボット | |
| JPH11199007A (ja) | カセットの搬送方法及び処理設備 | |
| JPS58216812A (ja) | 無塵室内物流搬送方法 | |
| JPH07117809A (ja) | 真空保管庫 | |
| JP2515003B2 (ja) | クリ―ンチュ―ブ装置 | |
| JPH072316B2 (ja) | 無塵室用搬送ロボットによる搬送方法 | |
| JPS61133640A (ja) | ウヱハ搬送装置 | |
| JPS60206017A (ja) | 清浄搬送システム | |
| JPS61177106A (ja) | 搬送装置 | |
| JP4829553B2 (ja) | 無人搬送車 | |
| JP2002060007A (ja) | 搬送システム | |
| JPH054718A (ja) | 磁気浮上搬送装置 | |
| JPH06183663A (ja) | クリーンルーム用昇降機 | |
| JPS6218317Y2 (enExample) | ||
| TWI286116B (en) | Stock system and cassette conveyer | |
| JPS59164696A (ja) | 真空容器の搬送装置 |