JPS6222830B2 - - Google Patents

Info

Publication number
JPS6222830B2
JPS6222830B2 JP16214078A JP16214078A JPS6222830B2 JP S6222830 B2 JPS6222830 B2 JP S6222830B2 JP 16214078 A JP16214078 A JP 16214078A JP 16214078 A JP16214078 A JP 16214078A JP S6222830 B2 JPS6222830 B2 JP S6222830B2
Authority
JP
Japan
Prior art keywords
conveyance
chamber
dust
conveyance path
blower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16214078A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5587650A (en
Inventor
Masakazu Yokoyama
Yorinobu Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16214078A priority Critical patent/JPS5587650A/ja
Publication of JPS5587650A publication Critical patent/JPS5587650A/ja
Publication of JPS6222830B2 publication Critical patent/JPS6222830B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP16214078A 1978-12-26 1978-12-26 Conveyor Granted JPS5587650A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16214078A JPS5587650A (en) 1978-12-26 1978-12-26 Conveyor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16214078A JPS5587650A (en) 1978-12-26 1978-12-26 Conveyor

Publications (2)

Publication Number Publication Date
JPS5587650A JPS5587650A (en) 1980-07-02
JPS6222830B2 true JPS6222830B2 (enExample) 1987-05-20

Family

ID=15748786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16214078A Granted JPS5587650A (en) 1978-12-26 1978-12-26 Conveyor

Country Status (1)

Country Link
JP (1) JPS5587650A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140841U (ja) * 1984-02-29 1985-09-18 株式会社椿本チエイン 物品搬送装置を収納した空気清浄室内の塵埃除去装置
JPH062527B2 (ja) * 1984-04-27 1994-01-12 株式会社東芝 クリーンルーム用搬送システム
JPH0541553Y2 (enExample) * 1986-11-04 1993-10-20

Also Published As

Publication number Publication date
JPS5587650A (en) 1980-07-02

Similar Documents

Publication Publication Date Title
JPS6162739A (ja) クリ−ントンネル
JPH02153546A (ja) 半導体の無塵化製造装置
CN110391162A (zh) 搬送机构
US5842917A (en) Automated manufacturing plant for semiconductor devices
JPS6222830B2 (enExample)
JPS6222829B2 (enExample)
KR100374085B1 (ko) 수송 장치
KR100541183B1 (ko) 스토커 및 이를 포함하는 반송 시스템
CN111605937B (zh) 物品输送设备
JPH11191582A (ja) カセット搬送システム
JPH11199007A (ja) カセットの搬送方法及び処理設備
JPS62292391A (ja) 無塵室用搬送ロボット
JPS61177106A (ja) 搬送装置
JPS59107846A (ja) 処理部における搬送設備
TWI286116B (en) Stock system and cassette conveyer
JPS619104A (ja) 磁気浮上搬送装置
JP4829553B2 (ja) 無人搬送車
JP2002060007A (ja) 搬送システム
CN212322971U (zh) 半导体制程系统
JPH07117809A (ja) 真空保管庫
JP2515003B2 (ja) クリ―ンチュ―ブ装置
JPH072316B2 (ja) 無塵室用搬送ロボットによる搬送方法
JP2935444B2 (ja) クリーンルーム用垂直搬送装置
US20030173189A1 (en) Stocker conveyor particle removing system
JP2610526B2 (ja) クリーンルーム内の荷取扱い設備