JPS55134238A - Clean box - Google Patents

Clean box

Info

Publication number
JPS55134238A
JPS55134238A JP3975779A JP3975779A JPS55134238A JP S55134238 A JPS55134238 A JP S55134238A JP 3975779 A JP3975779 A JP 3975779A JP 3975779 A JP3975779 A JP 3975779A JP S55134238 A JPS55134238 A JP S55134238A
Authority
JP
Japan
Prior art keywords
fan
filter
circulation path
driven
work
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3975779A
Other languages
Japanese (ja)
Inventor
Masakazu Yokoyama
Shinichi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3975779A priority Critical patent/JPS55134238A/en
Publication of JPS55134238A publication Critical patent/JPS55134238A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To obtain a clean box suitable for storing and transporting semi-finished products of electronic components by forming a circulation path by means of a partitioning plate provided in an airtight box and a fan fitted with a filter, and introducing into a purifying chamber an atomsphere stream which has passed through the filter. CONSTITUTION:A partitioning plate 8 is provided in an airtight box 7 so as to circulate an atmosphere stream, and a fan 9 is provided at one part of the circulation path. This circulation path starts from the fan 9, passes through a filter 10 and the purifying chamber 11 housing a work 1 as shown by arrows and dotted lines and returns to the fan 9. The fan 9 is driven by a motor 9a, which is driven by current from electric wire 12. By this, the work 1 is kept in a clean atmosphere so that it can be transported and stored in a processing chamber free from contamination.
JP3975779A 1979-04-04 1979-04-04 Clean box Pending JPS55134238A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3975779A JPS55134238A (en) 1979-04-04 1979-04-04 Clean box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3975779A JPS55134238A (en) 1979-04-04 1979-04-04 Clean box

Publications (1)

Publication Number Publication Date
JPS55134238A true JPS55134238A (en) 1980-10-18

Family

ID=12561816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3975779A Pending JPS55134238A (en) 1979-04-04 1979-04-04 Clean box

Country Status (1)

Country Link
JP (1) JPS55134238A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175628U (en) * 1982-05-19 1983-11-24 三菱マテリアル株式会社 Semiconductor wafer packaging containers
JPS6054142U (en) * 1983-09-20 1985-04-16 日本電気株式会社 Chamber for alignment exposure device
US4787297A (en) * 1987-08-27 1988-11-29 Texas Instruments Incorporated Stacked robotic work cell process station
US6521007B1 (en) 1997-12-03 2003-02-18 Ebara Corporation Clean box

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175628U (en) * 1982-05-19 1983-11-24 三菱マテリアル株式会社 Semiconductor wafer packaging containers
JPH0451482Y2 (en) * 1982-05-19 1992-12-03
JPS6054142U (en) * 1983-09-20 1985-04-16 日本電気株式会社 Chamber for alignment exposure device
US4787297A (en) * 1987-08-27 1988-11-29 Texas Instruments Incorporated Stacked robotic work cell process station
US6521007B1 (en) 1997-12-03 2003-02-18 Ebara Corporation Clean box

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