JPS6218317Y2 - - Google Patents
Info
- Publication number
- JPS6218317Y2 JPS6218317Y2 JP17829882U JP17829882U JPS6218317Y2 JP S6218317 Y2 JPS6218317 Y2 JP S6218317Y2 JP 17829882 U JP17829882 U JP 17829882U JP 17829882 U JP17829882 U JP 17829882U JP S6218317 Y2 JPS6218317 Y2 JP S6218317Y2
- Authority
- JP
- Japan
- Prior art keywords
- box
- gas
- transport vehicle
- air
- items
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 17
- 239000011261 inert gas Substances 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 4
- 238000011109 contamination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000003915 air pollution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Prevention Of Fouling (AREA)
- Handcart (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17829882U JPS5982594U (ja) | 1982-11-24 | 1982-11-24 | 物品搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17829882U JPS5982594U (ja) | 1982-11-24 | 1982-11-24 | 物品搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5982594U JPS5982594U (ja) | 1984-06-04 |
| JPS6218317Y2 true JPS6218317Y2 (enExample) | 1987-05-11 |
Family
ID=30387138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17829882U Granted JPS5982594U (ja) | 1982-11-24 | 1982-11-24 | 物品搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5982594U (enExample) |
-
1982
- 1982-11-24 JP JP17829882U patent/JPS5982594U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5982594U (ja) | 1984-06-04 |
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