JPH0556030B2 - - Google Patents

Info

Publication number
JPH0556030B2
JPH0556030B2 JP62037801A JP3780187A JPH0556030B2 JP H0556030 B2 JPH0556030 B2 JP H0556030B2 JP 62037801 A JP62037801 A JP 62037801A JP 3780187 A JP3780187 A JP 3780187A JP H0556030 B2 JPH0556030 B2 JP H0556030B2
Authority
JP
Japan
Prior art keywords
josephson junction
film
lower electrode
junction element
niobium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62037801A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63205975A (ja
Inventor
Mutsuo Hidaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62037801A priority Critical patent/JPS63205975A/ja
Publication of JPS63205975A publication Critical patent/JPS63205975A/ja
Publication of JPH0556030B2 publication Critical patent/JPH0556030B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62037801A 1987-02-23 1987-02-23 ジヨセフソン接合素子の製造方法 Granted JPS63205975A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62037801A JPS63205975A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62037801A JPS63205975A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合素子の製造方法

Publications (2)

Publication Number Publication Date
JPS63205975A JPS63205975A (ja) 1988-08-25
JPH0556030B2 true JPH0556030B2 (enrdf_load_stackoverflow) 1993-08-18

Family

ID=12507611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62037801A Granted JPS63205975A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合素子の製造方法

Country Status (1)

Country Link
JP (1) JPS63205975A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10003005B2 (en) 2016-08-23 2018-06-19 Northrop Grumman Systems Corporation Superconductor device interconnect
WO2018065833A1 (en) * 2016-10-04 2018-04-12 International Business Machines Corporation Superconducting electronic integrated circuit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145177A (ja) * 1982-02-23 1983-08-29 Nec Corp ジヨセフソン接合素子の製造方法
JPS6215868A (ja) * 1985-07-13 1987-01-24 Agency Of Ind Science & Technol 集積回路用コンタクトの製造方法

Also Published As

Publication number Publication date
JPS63205975A (ja) 1988-08-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term