JPS63205975A - ジヨセフソン接合素子の製造方法 - Google Patents

ジヨセフソン接合素子の製造方法

Info

Publication number
JPS63205975A
JPS63205975A JP62037801A JP3780187A JPS63205975A JP S63205975 A JPS63205975 A JP S63205975A JP 62037801 A JP62037801 A JP 62037801A JP 3780187 A JP3780187 A JP 3780187A JP S63205975 A JPS63205975 A JP S63205975A
Authority
JP
Japan
Prior art keywords
josephson junction
lower electrode
film
unevenness
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62037801A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556030B2 (enrdf_load_stackoverflow
Inventor
Mutsuo Hidaka
睦夫 日高
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62037801A priority Critical patent/JPS63205975A/ja
Publication of JPS63205975A publication Critical patent/JPS63205975A/ja
Publication of JPH0556030B2 publication Critical patent/JPH0556030B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP62037801A 1987-02-23 1987-02-23 ジヨセフソン接合素子の製造方法 Granted JPS63205975A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62037801A JPS63205975A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62037801A JPS63205975A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合素子の製造方法

Publications (2)

Publication Number Publication Date
JPS63205975A true JPS63205975A (ja) 1988-08-25
JPH0556030B2 JPH0556030B2 (enrdf_load_stackoverflow) 1993-08-18

Family

ID=12507611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62037801A Granted JPS63205975A (ja) 1987-02-23 1987-02-23 ジヨセフソン接合素子の製造方法

Country Status (1)

Country Link
JP (1) JPS63205975A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018065833A1 (en) * 2016-10-04 2018-04-12 International Business Machines Corporation Superconducting electronic integrated circuit
WO2018089061A3 (en) * 2016-08-23 2018-07-05 Northrop Grumman Systems Corporation Josephson junction superconductor device interconnect

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145177A (ja) * 1982-02-23 1983-08-29 Nec Corp ジヨセフソン接合素子の製造方法
JPS6215868A (ja) * 1985-07-13 1987-01-24 Agency Of Ind Science & Technol 集積回路用コンタクトの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145177A (ja) * 1982-02-23 1983-08-29 Nec Corp ジヨセフソン接合素子の製造方法
JPS6215868A (ja) * 1985-07-13 1987-01-24 Agency Of Ind Science & Technol 集積回路用コンタクトの製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018089061A3 (en) * 2016-08-23 2018-07-05 Northrop Grumman Systems Corporation Josephson junction superconductor device interconnect
US10158062B2 (en) 2016-08-23 2018-12-18 Northrop Grumman Systems Corporation Superconductor device interconnect
JP2019528577A (ja) * 2016-08-23 2019-10-10 ノースロップ グラマン システムズ コーポレイションＮｏｒｔｈｒｏｐ Ｇｒｕｍｍａｎ Ｓｙｓｔｅｍｓ Ｃｏｒｐｏｒａｔｉｏｎ 超伝導デバイスの相互接続
WO2018065833A1 (en) * 2016-10-04 2018-04-12 International Business Machines Corporation Superconducting electronic integrated circuit

Also Published As

Publication number Publication date
JPH0556030B2 (enrdf_load_stackoverflow) 1993-08-18

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Legal Events

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