JPH0554169B2 - - Google Patents
Info
- Publication number
- JPH0554169B2 JPH0554169B2 JP1305988A JP1305988A JPH0554169B2 JP H0554169 B2 JPH0554169 B2 JP H0554169B2 JP 1305988 A JP1305988 A JP 1305988A JP 1305988 A JP1305988 A JP 1305988A JP H0554169 B2 JPH0554169 B2 JP H0554169B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- film
- level difference
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010410 layer Substances 0.000 claims description 99
- 239000010409 thin film Substances 0.000 claims description 27
- 229920002120 photoresistant polymer Polymers 0.000 claims description 19
- 230000008030 elimination Effects 0.000 claims description 12
- 238000003379 elimination reaction Methods 0.000 claims description 12
- 229920002432 poly(vinyl methyl ether) polymer Polymers 0.000 claims description 10
- 229920003986 novolac Polymers 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011368 organic material Substances 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 239000012044 organic layer Substances 0.000 claims description 3
- 239000010408 film Substances 0.000 description 20
- 238000010438 heat treatment Methods 0.000 description 6
- 238000005336 cracking Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 230000001681 protective effect Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305988A JPH01189008A (ja) | 1988-01-22 | 1988-01-22 | 薄膜磁気ヘッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1305988A JPH01189008A (ja) | 1988-01-22 | 1988-01-22 | 薄膜磁気ヘッド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01189008A JPH01189008A (ja) | 1989-07-28 |
| JPH0554169B2 true JPH0554169B2 (enrdf_load_stackoverflow) | 1993-08-11 |
Family
ID=11822559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1305988A Granted JPH01189008A (ja) | 1988-01-22 | 1988-01-22 | 薄膜磁気ヘッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01189008A (enrdf_load_stackoverflow) |
-
1988
- 1988-01-22 JP JP1305988A patent/JPH01189008A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01189008A (ja) | 1989-07-28 |
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