JPH0551844B2 - - Google Patents

Info

Publication number
JPH0551844B2
JPH0551844B2 JP58106675A JP10667583A JPH0551844B2 JP H0551844 B2 JPH0551844 B2 JP H0551844B2 JP 58106675 A JP58106675 A JP 58106675A JP 10667583 A JP10667583 A JP 10667583A JP H0551844 B2 JPH0551844 B2 JP H0551844B2
Authority
JP
Japan
Prior art keywords
difference signal
value
edge position
memory
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58106675A
Other languages
English (en)
Japanese (ja)
Other versions
JPS606806A (ja
Inventor
Yasuhide Nakai
Manabu Nakatsuka
Hideo Nakazato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
Original Assignee
Kobe Steel Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd filed Critical Kobe Steel Ltd
Priority to JP10667583A priority Critical patent/JPS606806A/ja
Publication of JPS606806A publication Critical patent/JPS606806A/ja
Publication of JPH0551844B2 publication Critical patent/JPH0551844B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP10667583A 1983-06-16 1983-06-16 光学的エツジ位置検出方法 Granted JPS606806A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10667583A JPS606806A (ja) 1983-06-16 1983-06-16 光学的エツジ位置検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10667583A JPS606806A (ja) 1983-06-16 1983-06-16 光学的エツジ位置検出方法

Publications (2)

Publication Number Publication Date
JPS606806A JPS606806A (ja) 1985-01-14
JPH0551844B2 true JPH0551844B2 (enExample) 1993-08-03

Family

ID=14439641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10667583A Granted JPS606806A (ja) 1983-06-16 1983-06-16 光学的エツジ位置検出方法

Country Status (1)

Country Link
JP (1) JPS606806A (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2507040B2 (de) * 1974-04-24 1977-03-03 Zygo Corp., Middlefield, Conn. (V.StA.) Optoelektronische messvorrichtung fuer die lage einer kontrastierenden kante eines gegenstandes

Also Published As

Publication number Publication date
JPS606806A (ja) 1985-01-14

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