JPH0550662B2 - - Google Patents

Info

Publication number
JPH0550662B2
JPH0550662B2 JP61133035A JP13303586A JPH0550662B2 JP H0550662 B2 JPH0550662 B2 JP H0550662B2 JP 61133035 A JP61133035 A JP 61133035A JP 13303586 A JP13303586 A JP 13303586A JP H0550662 B2 JPH0550662 B2 JP H0550662B2
Authority
JP
Japan
Prior art keywords
ventilation
layer
air
resistor layer
hepa filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61133035A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62288433A (ja
Inventor
Takao Okada
Toshio Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takasago Thermal Engineering Co Ltd
Original Assignee
Takasago Thermal Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takasago Thermal Engineering Co Ltd filed Critical Takasago Thermal Engineering Co Ltd
Priority to JP61133035A priority Critical patent/JPS62288433A/ja
Publication of JPS62288433A publication Critical patent/JPS62288433A/ja
Publication of JPH0550662B2 publication Critical patent/JPH0550662B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP61133035A 1986-06-09 1986-06-09 クリ−ンル−ム用の空気吹き出し設備 Granted JPS62288433A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61133035A JPS62288433A (ja) 1986-06-09 1986-06-09 クリ−ンル−ム用の空気吹き出し設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61133035A JPS62288433A (ja) 1986-06-09 1986-06-09 クリ−ンル−ム用の空気吹き出し設備

Publications (2)

Publication Number Publication Date
JPS62288433A JPS62288433A (ja) 1987-12-15
JPH0550662B2 true JPH0550662B2 (enrdf_load_stackoverflow) 1993-07-29

Family

ID=15095287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61133035A Granted JPS62288433A (ja) 1986-06-09 1986-06-09 クリ−ンル−ム用の空気吹き出し設備

Country Status (1)

Country Link
JP (1) JPS62288433A (enrdf_load_stackoverflow)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2507121B2 (ja) * 1990-02-28 1996-06-12 松下電器産業株式会社 留守番電話装置
JP2917367B2 (ja) * 1990-02-28 1999-07-12 松下電器産業株式会社 文字認識装置
JPH03284730A (ja) * 1990-03-30 1991-12-16 Hitachi Chem Co Ltd 電気泳動表示装置用表示パネルの製造法
JP2551923Y2 (ja) * 1990-05-07 1997-10-27 清水建設株式会社 クリーンルーム
JPH048029U (enrdf_load_stackoverflow) * 1990-05-07 1992-01-24
JP2524214Y2 (ja) * 1990-08-13 1997-01-29 株式会社大氣社 クリーンルーム設備
JP3501173B2 (ja) * 1994-08-30 2004-03-02 三機工業株式会社 ダウンフロー式クリーンルーム
JP3773327B2 (ja) * 1997-05-14 2006-05-10 三機工業株式会社 空調装置
US7375791B2 (en) * 2005-06-30 2008-05-20 Asml Holding N.V. Laminar flow gas curtains for lithographic applications
US7924399B2 (en) * 2006-03-27 2011-04-12 Asml Netherlands B.V. Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods
CN108302618B (zh) * 2018-01-15 2020-06-02 北京艾瑞克林科技有限公司 一种新风机
TW202015196A (zh) * 2018-10-12 2020-04-16 國立臺北科技大學 層流裝置
JP7555774B2 (ja) 2020-09-29 2024-09-25 芝浦メカトロニクス株式会社 送風器及び電子部品の実装装置

Also Published As

Publication number Publication date
JPS62288433A (ja) 1987-12-15

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term