JPH0549730B2 - - Google Patents
Info
- Publication number
- JPH0549730B2 JPH0549730B2 JP60208098A JP20809885A JPH0549730B2 JP H0549730 B2 JPH0549730 B2 JP H0549730B2 JP 60208098 A JP60208098 A JP 60208098A JP 20809885 A JP20809885 A JP 20809885A JP H0549730 B2 JPH0549730 B2 JP H0549730B2
- Authority
- JP
- Japan
- Prior art keywords
- powder
- metals
- iron group
- rare earth
- hot
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000843 powder Substances 0.000 claims description 68
- 229910052751 metal Inorganic materials 0.000 claims description 55
- 239000002184 metal Substances 0.000 claims description 55
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 27
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 27
- 150000002910 rare earth metals Chemical class 0.000 claims description 27
- 239000013077 target material Substances 0.000 claims description 27
- 229910000765 intermetallic Inorganic materials 0.000 claims description 18
- 238000010438 heat treatment Methods 0.000 claims description 17
- 239000010409 thin film Substances 0.000 claims description 14
- 239000007791 liquid phase Substances 0.000 claims description 13
- 239000011812 mixed powder Substances 0.000 claims description 11
- 238000004544 sputter deposition Methods 0.000 claims description 11
- -1 iron group metals Chemical class 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 10
- 150000002739 metals Chemical class 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 7
- 239000000956 alloy Substances 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 5
- 238000005096 rolling process Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005242 forging Methods 0.000 claims description 2
- 238000001513 hot isostatic pressing Methods 0.000 claims description 2
- 238000007731 hot pressing Methods 0.000 claims description 2
- 239000011159 matrix material Substances 0.000 claims description 2
- 238000009826 distribution Methods 0.000 claims 1
- 229910001092 metal group alloy Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 description 12
- 239000002245 particle Substances 0.000 description 11
- 238000010894 electron beam technology Methods 0.000 description 5
- 230000005496 eutectics Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 229910001371 Er alloy Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910020630 Co Ni Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002440 Co–Ni Inorganic materials 0.000 description 1
- 229910001279 Dy alloy Inorganic materials 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910017061 Fe Co Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910001106 Ho alloy Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910017709 Ni Co Inorganic materials 0.000 description 1
- 229910003267 Ni-Co Inorganic materials 0.000 description 1
- 229910003262 Ni‐Co Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000005098 hot rolling Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009461 vacuum packaging Methods 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60208098A JPS6270550A (ja) | 1985-09-20 | 1985-09-20 | タ−ゲツト材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60208098A JPS6270550A (ja) | 1985-09-20 | 1985-09-20 | タ−ゲツト材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6270550A JPS6270550A (ja) | 1987-04-01 |
| JPH0549730B2 true JPH0549730B2 (zh) | 1993-07-27 |
Family
ID=16550601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60208098A Granted JPS6270550A (ja) | 1985-09-20 | 1985-09-20 | タ−ゲツト材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6270550A (zh) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63118028A (ja) * | 1986-11-06 | 1988-05-23 | Hitachi Metals Ltd | 希土類元素−遷移金属元素タ−ゲツト及びその製造方法 |
| JPS63250429A (ja) * | 1987-04-06 | 1988-10-18 | Seiko Instr & Electronics Ltd | イツテルビウム−遷移金属系合金の製造方法 |
| JPH0768612B2 (ja) * | 1987-04-20 | 1995-07-26 | 日立金属株式会社 | 希土類金属―鉄族金属ターゲット用合金粉末、希土類金属―鉄族金属ターゲット、およびそれらの製造方法 |
| JPS63274764A (ja) * | 1987-04-30 | 1988-11-11 | Sumitomo Metal Mining Co Ltd | 光磁気記録用合金タ−ゲツト |
| EP0308201B1 (en) * | 1987-09-17 | 1993-11-18 | Seiko Epson Corporation | Method of forming a sputtering target for use in producing a magneto-optic recording medium |
| US4824481A (en) * | 1988-01-11 | 1989-04-25 | Eaastman Kodak Company | Sputtering targets for magneto-optic films and a method for making |
| US5439500A (en) * | 1993-12-02 | 1995-08-08 | Materials Research Corporation | Magneto-optical alloy sputter targets |
| KR100812943B1 (ko) | 2003-08-05 | 2008-03-11 | 닛코킨조쿠 가부시키가이샤 | 스퍼터링 타겟트 및 그 제조방법 |
| CN101061252A (zh) | 2004-11-15 | 2007-10-24 | 日矿金属株式会社 | 用于制造金属玻璃膜的溅射靶及其制造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61139637A (ja) * | 1984-12-12 | 1986-06-26 | Hitachi Metals Ltd | スパツタ用タ−ゲツトとその製造方法 |
| JPS61229314A (ja) * | 1985-04-03 | 1986-10-13 | Hitachi Metals Ltd | タ−ゲツト材料およびその製造方法 |
-
1985
- 1985-09-20 JP JP60208098A patent/JPS6270550A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61139637A (ja) * | 1984-12-12 | 1986-06-26 | Hitachi Metals Ltd | スパツタ用タ−ゲツトとその製造方法 |
| JPS61229314A (ja) * | 1985-04-03 | 1986-10-13 | Hitachi Metals Ltd | タ−ゲツト材料およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6270550A (ja) | 1987-04-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |