JPH0549170B2 - - Google Patents
Info
- Publication number
- JPH0549170B2 JPH0549170B2 JP62177597A JP17759787A JPH0549170B2 JP H0549170 B2 JPH0549170 B2 JP H0549170B2 JP 62177597 A JP62177597 A JP 62177597A JP 17759787 A JP17759787 A JP 17759787A JP H0549170 B2 JPH0549170 B2 JP H0549170B2
- Authority
- JP
- Japan
- Prior art keywords
- infrared
- layer
- opening
- dielectric layer
- cold shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62177597A JPS6420656A (en) | 1987-07-15 | 1987-07-15 | Cold shield for infrared ray detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62177597A JPS6420656A (en) | 1987-07-15 | 1987-07-15 | Cold shield for infrared ray detector |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4205366A Division JPH05231928A (ja) | 1992-07-31 | 1992-07-31 | 赤外線検知素子用コールドシールド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6420656A JPS6420656A (en) | 1989-01-24 |
| JPH0549170B2 true JPH0549170B2 (enrdf_load_stackoverflow) | 1993-07-23 |
Family
ID=16033778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62177597A Granted JPS6420656A (en) | 1987-07-15 | 1987-07-15 | Cold shield for infrared ray detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6420656A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05231928A (ja) * | 1992-07-31 | 1993-09-07 | Fujitsu Ltd | 赤外線検知素子用コールドシールド |
| JP2008544263A (ja) * | 2005-06-27 | 2008-12-04 | エイチエル−プラナー・テクニク・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 電磁波検出用装置及びそのような装置製造のための方法 |
| JP6003605B2 (ja) * | 2012-12-12 | 2016-10-05 | Tdk株式会社 | 赤外線検知装置 |
| JP5860071B2 (ja) * | 2014-02-12 | 2016-02-16 | 株式会社半導体エネルギー研究所 | 半導体装置 |
-
1987
- 1987-07-15 JP JP62177597A patent/JPS6420656A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6420656A (en) | 1989-01-24 |
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