JPS6420656A - Cold shield for infrared ray detector - Google Patents
Cold shield for infrared ray detectorInfo
- Publication number
- JPS6420656A JPS6420656A JP62177597A JP17759787A JPS6420656A JP S6420656 A JPS6420656 A JP S6420656A JP 62177597 A JP62177597 A JP 62177597A JP 17759787 A JP17759787 A JP 17759787A JP S6420656 A JPS6420656 A JP S6420656A
- Authority
- JP
- Japan
- Prior art keywords
- infrared ray
- layer
- opening
- layer structure
- cold shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To obtain a cold shield for an infrared ray detector which is not isolated from a dielectric layer and has high reliability by simple manufacturing steps by laminating an infrared ray absorber layer and an infrared ray reflector layer, each having an opening, on both side faces of an infrared ray transmitting base material. CONSTITUTION:After dielectric layers 22 are formed by depositing on both upper and lower faces of an infrared ray transmitting substrate 21, a photoresist film having the same area as that of an opening 23 on the layer 22 is formed on the forming region of the opening 23, metal films of an infrared ray absorber layer 24, an infrared ray reflector layer 25 and an infrared ray absorber layer 24 of 3-layer structure are formed by depositing thereon, and the pattern-formed photoresist film is removed to remove the metal film of the 3-layer structure. After the forming region of an opening 26 is coated with a photoresist having the same area as that of the opening 26 under the layer 22, an infrared ray absorber layer 24 and an infrared ray reflector layer 25 of 2-layer structure are formed thereon, and the photoresist film is removed to remove the metal film of the 2-layer structure. Thus, it can prevent them from exfoliating from the dielectric layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62177597A JPS6420656A (en) | 1987-07-15 | 1987-07-15 | Cold shield for infrared ray detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62177597A JPS6420656A (en) | 1987-07-15 | 1987-07-15 | Cold shield for infrared ray detector |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4205366A Division JPH05231928A (en) | 1992-07-31 | 1992-07-31 | Cold shield for infrared detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6420656A true JPS6420656A (en) | 1989-01-24 |
| JPH0549170B2 JPH0549170B2 (en) | 1993-07-23 |
Family
ID=16033778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62177597A Granted JPS6420656A (en) | 1987-07-15 | 1987-07-15 | Cold shield for infrared ray detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6420656A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05231928A (en) * | 1992-07-31 | 1993-09-07 | Fujitsu Ltd | Cold shield for infrared detector |
| JP2008544263A (en) * | 2005-06-27 | 2008-12-04 | エイチエル−プラナー・テクニク・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Electromagnetic wave detection device and method for manufacturing such a device |
| JP2014115244A (en) * | 2012-12-12 | 2014-06-26 | Tdk Corp | Infrared detector |
| JP2014142644A (en) * | 2014-02-12 | 2014-08-07 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
-
1987
- 1987-07-15 JP JP62177597A patent/JPS6420656A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05231928A (en) * | 1992-07-31 | 1993-09-07 | Fujitsu Ltd | Cold shield for infrared detector |
| JP2008544263A (en) * | 2005-06-27 | 2008-12-04 | エイチエル−プラナー・テクニク・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | Electromagnetic wave detection device and method for manufacturing such a device |
| JP2014115244A (en) * | 2012-12-12 | 2014-06-26 | Tdk Corp | Infrared detector |
| JP2014142644A (en) * | 2014-02-12 | 2014-08-07 | Semiconductor Energy Lab Co Ltd | Semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0549170B2 (en) | 1993-07-23 |
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