JPS6420656A - Cold shield for infrared ray detector - Google Patents

Cold shield for infrared ray detector

Info

Publication number
JPS6420656A
JPS6420656A JP62177597A JP17759787A JPS6420656A JP S6420656 A JPS6420656 A JP S6420656A JP 62177597 A JP62177597 A JP 62177597A JP 17759787 A JP17759787 A JP 17759787A JP S6420656 A JPS6420656 A JP S6420656A
Authority
JP
Japan
Prior art keywords
infrared ray
layer
opening
layer structure
cold shield
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62177597A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0549170B2 (enrdf_load_stackoverflow
Inventor
Toru Maekawa
Hiroshi Takigawa
Shigeki Hamashima
Tomoshi Ueda
Tetsuya Kawachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62177597A priority Critical patent/JPS6420656A/ja
Publication of JPS6420656A publication Critical patent/JPS6420656A/ja
Publication of JPH0549170B2 publication Critical patent/JPH0549170B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP62177597A 1987-07-15 1987-07-15 Cold shield for infrared ray detector Granted JPS6420656A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62177597A JPS6420656A (en) 1987-07-15 1987-07-15 Cold shield for infrared ray detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62177597A JPS6420656A (en) 1987-07-15 1987-07-15 Cold shield for infrared ray detector

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4205366A Division JPH05231928A (ja) 1992-07-31 1992-07-31 赤外線検知素子用コールドシールド

Publications (2)

Publication Number Publication Date
JPS6420656A true JPS6420656A (en) 1989-01-24
JPH0549170B2 JPH0549170B2 (enrdf_load_stackoverflow) 1993-07-23

Family

ID=16033778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62177597A Granted JPS6420656A (en) 1987-07-15 1987-07-15 Cold shield for infrared ray detector

Country Status (1)

Country Link
JP (1) JPS6420656A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05231928A (ja) * 1992-07-31 1993-09-07 Fujitsu Ltd 赤外線検知素子用コールドシールド
JP2008544263A (ja) * 2005-06-27 2008-12-04 エイチエル−プラナー・テクニク・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 電磁波検出用装置及びそのような装置製造のための方法
JP2014115244A (ja) * 2012-12-12 2014-06-26 Tdk Corp 赤外線検知装置
JP2014142644A (ja) * 2014-02-12 2014-08-07 Semiconductor Energy Lab Co Ltd 半導体装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05231928A (ja) * 1992-07-31 1993-09-07 Fujitsu Ltd 赤外線検知素子用コールドシールド
JP2008544263A (ja) * 2005-06-27 2008-12-04 エイチエル−プラナー・テクニク・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 電磁波検出用装置及びそのような装置製造のための方法
JP2014115244A (ja) * 2012-12-12 2014-06-26 Tdk Corp 赤外線検知装置
JP2014142644A (ja) * 2014-02-12 2014-08-07 Semiconductor Energy Lab Co Ltd 半導体装置

Also Published As

Publication number Publication date
JPH0549170B2 (enrdf_load_stackoverflow) 1993-07-23

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