JPH0546978B2 - - Google Patents

Info

Publication number
JPH0546978B2
JPH0546978B2 JP61275912A JP27591286A JPH0546978B2 JP H0546978 B2 JPH0546978 B2 JP H0546978B2 JP 61275912 A JP61275912 A JP 61275912A JP 27591286 A JP27591286 A JP 27591286A JP H0546978 B2 JPH0546978 B2 JP H0546978B2
Authority
JP
Japan
Prior art keywords
semiconductor device
aluminum
manufacturing
steam
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP61275912A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63128634A (ja
Inventor
Eiji Hagimoto
Seiichi Nishino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61275912A priority Critical patent/JPS63128634A/ja
Publication of JPS63128634A publication Critical patent/JPS63128634A/ja
Publication of JPH0546978B2 publication Critical patent/JPH0546978B2/ja
Granted legal-status Critical Current

Links

Classifications

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    • H01L24/02—Bonding areas ; Manufacturing methods related thereto
    • H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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    • H01L2224/02—Bonding areas; Manufacturing methods related thereto
    • H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
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    • H01L2224/05624—Aluminium [Al] as principal constituent
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Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)
JP61275912A 1986-11-18 1986-11-18 半導体装置の製造方法 Granted JPS63128634A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61275912A JPS63128634A (ja) 1986-11-18 1986-11-18 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61275912A JPS63128634A (ja) 1986-11-18 1986-11-18 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63128634A JPS63128634A (ja) 1988-06-01
JPH0546978B2 true JPH0546978B2 (enrdf_load_stackoverflow) 1993-07-15

Family

ID=17562157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61275912A Granted JPS63128634A (ja) 1986-11-18 1986-11-18 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63128634A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW426980B (en) * 1999-01-23 2001-03-21 Lucent Technologies Inc Wire bonding to copper
EP2444999A4 (en) 2009-06-18 2012-11-14 Rohm Co Ltd SEMICONDUCTOR DEVICE
US20120032354A1 (en) * 2010-08-06 2012-02-09 National Semiconductor Corporation Wirebonding method and device enabling high-speed reverse wedge bonding of wire bonds
JP6579653B2 (ja) * 2015-06-24 2019-09-25 ローム株式会社 半導体装置および半導体装置の製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56116634A (en) * 1980-02-20 1981-09-12 Hitachi Ltd Semiconductor device
JPS56162844A (en) * 1980-05-19 1981-12-15 Hitachi Ltd Semiconductor device and manufacture thereof
JPS59150460A (ja) * 1983-01-31 1984-08-28 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS63128634A (ja) 1988-06-01

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