JPH0545489B2 - - Google Patents
Info
- Publication number
- JPH0545489B2 JPH0545489B2 JP27432285A JP27432285A JPH0545489B2 JP H0545489 B2 JPH0545489 B2 JP H0545489B2 JP 27432285 A JP27432285 A JP 27432285A JP 27432285 A JP27432285 A JP 27432285A JP H0545489 B2 JPH0545489 B2 JP H0545489B2
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- mask substrate
- mounting table
- sides
- present
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 24
- 230000007246 mechanism Effects 0.000 claims description 18
- 238000001125 extrusion Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000007689 inspection Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Special Conveying (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Intermediate Stations On Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27432285A JPS62136428A (ja) | 1985-12-07 | 1985-12-07 | 角形マスク基板移送機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27432285A JPS62136428A (ja) | 1985-12-07 | 1985-12-07 | 角形マスク基板移送機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62136428A JPS62136428A (ja) | 1987-06-19 |
JPH0545489B2 true JPH0545489B2 (zh) | 1993-07-09 |
Family
ID=17540032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27432285A Granted JPS62136428A (ja) | 1985-12-07 | 1985-12-07 | 角形マスク基板移送機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62136428A (zh) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2547783Y2 (ja) * | 1991-03-29 | 1997-09-17 | 大日本スクリーン製造株式会社 | 基板の表面処理装置 |
US5746234A (en) * | 1994-11-18 | 1998-05-05 | Advanced Chemill Systems | Method and apparatus for cleaning thin substrates |
US5720813A (en) | 1995-06-07 | 1998-02-24 | Eamon P. McDonald | Thin sheet handling system |
US6517303B1 (en) * | 1998-05-20 | 2003-02-11 | Applied Komatsu Technology, Inc. | Substrate transfer shuttle |
JP2003095435A (ja) * | 2001-09-27 | 2003-04-03 | Ebara Corp | 四辺形基板搬送ロボット |
IT1394327B1 (it) * | 2009-04-15 | 2012-06-06 | Antonello | Dispositivo di trascinamento di celle fotovoltaiche o dei loro substrati durante il processo di fabbricazione delle celle fotovoltaiche |
US20130121802A1 (en) * | 2011-11-14 | 2013-05-16 | Memc Electronic Materials, Inc. | Wafer Transport Cart |
-
1985
- 1985-12-07 JP JP27432285A patent/JPS62136428A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62136428A (ja) | 1987-06-19 |
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