JPH0543304B2 - - Google Patents

Info

Publication number
JPH0543304B2
JPH0543304B2 JP61283616A JP28361686A JPH0543304B2 JP H0543304 B2 JPH0543304 B2 JP H0543304B2 JP 61283616 A JP61283616 A JP 61283616A JP 28361686 A JP28361686 A JP 28361686A JP H0543304 B2 JPH0543304 B2 JP H0543304B2
Authority
JP
Japan
Prior art keywords
etching
etching solution
acid
recess
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61283616A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63136675A (ja
Inventor
Akio Kyomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanken Electric Co Ltd
Original Assignee
Sanken Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanken Electric Co Ltd filed Critical Sanken Electric Co Ltd
Priority to JP28361686A priority Critical patent/JPS63136675A/ja
Publication of JPS63136675A publication Critical patent/JPS63136675A/ja
Publication of JPH0543304B2 publication Critical patent/JPH0543304B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Sensors (AREA)
  • Weting (AREA)
JP28361686A 1986-11-28 1986-11-28 ダイヤフラム式半導体圧力センサ−の製造方法 Granted JPS63136675A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28361686A JPS63136675A (ja) 1986-11-28 1986-11-28 ダイヤフラム式半導体圧力センサ−の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28361686A JPS63136675A (ja) 1986-11-28 1986-11-28 ダイヤフラム式半導体圧力センサ−の製造方法

Publications (2)

Publication Number Publication Date
JPS63136675A JPS63136675A (ja) 1988-06-08
JPH0543304B2 true JPH0543304B2 (enExample) 1993-07-01

Family

ID=17667810

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28361686A Granted JPS63136675A (ja) 1986-11-28 1986-11-28 ダイヤフラム式半導体圧力センサ−の製造方法

Country Status (1)

Country Link
JP (1) JPS63136675A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5217163B2 (ja) * 2004-05-12 2013-06-19 セイコーエプソン株式会社 圧力センサ
JP5847963B2 (ja) * 2011-12-28 2016-01-27 ソウルブレイン シーオー．， エルティーディー． エッチング液組成物およびこれを用いたウェットエッチング方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040832A (enExample) * 1973-08-16 1975-04-14
JPS592192B2 (ja) * 1975-11-17 1984-01-17 株式会社東芝 ハンドウタイアツリヨクヘンカンソウチ
JPS5664471A (en) * 1979-10-30 1981-06-01 Toshiba Corp Detector for pressure of semiconductor

Also Published As

Publication number Publication date
JPS63136675A (ja) 1988-06-08

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