JPH0471344B2 - - Google Patents

Info

Publication number
JPH0471344B2
JPH0471344B2 JP58201196A JP20119683A JPH0471344B2 JP H0471344 B2 JPH0471344 B2 JP H0471344B2 JP 58201196 A JP58201196 A JP 58201196A JP 20119683 A JP20119683 A JP 20119683A JP H0471344 B2 JPH0471344 B2 JP H0471344B2
Authority
JP
Japan
Prior art keywords
type
silicon layer
porous silicon
layer
cantilever
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58201196A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6092671A (ja
Inventor
Akinobu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP58201196A priority Critical patent/JPS6092671A/ja
Publication of JPS6092671A publication Critical patent/JPS6092671A/ja
Publication of JPH0471344B2 publication Critical patent/JPH0471344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP58201196A 1983-10-27 1983-10-27 半導体加速度センサの製造方法 Granted JPS6092671A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58201196A JPS6092671A (ja) 1983-10-27 1983-10-27 半導体加速度センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58201196A JPS6092671A (ja) 1983-10-27 1983-10-27 半導体加速度センサの製造方法

Publications (2)

Publication Number Publication Date
JPS6092671A JPS6092671A (ja) 1985-05-24
JPH0471344B2 true JPH0471344B2 (enExample) 1992-11-13

Family

ID=16436933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58201196A Granted JPS6092671A (ja) 1983-10-27 1983-10-27 半導体加速度センサの製造方法

Country Status (1)

Country Link
JP (1) JPS6092671A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0821722B2 (ja) * 1985-10-08 1996-03-04 日本電装株式会社 半導体振動・加速度検出装置
JP2701845B2 (ja) * 1987-08-21 1998-01-21 株式会社東海理化電機製作所 シリコン薄膜の製造方法
JP2765610B2 (ja) * 1993-09-02 1998-06-18 株式会社デンソー 半導体振動・加速度検出装置
KR970010663B1 (ko) * 1993-12-24 1997-06-30 만도기계 주식회사 8개의 빔을 갖는 브릿지형 실리콘 가속도센서 및 그 제조방법
CN110161282B (zh) * 2019-05-22 2021-03-30 龙微科技无锡有限公司 基于son结构的压阻式加速度传感器的制作方法

Also Published As

Publication number Publication date
JPS6092671A (ja) 1985-05-24

Similar Documents

Publication Publication Date Title
JPH0453267B2 (enExample)
JP2560140B2 (ja) 半導体装置
WO2000034754A1 (fr) Capteur de pression a semi-conducteurs et son procede de fabrication
US5172205A (en) Piezoresistive semiconductor device suitable for use in a pressure sensor
JPH08111533A (ja) 表面型の加速度センサ及びその製造方法
JPH11142270A (ja) 多結晶性半導体材料のダイアフラムを有する集積ピエゾ抵抗性圧力センサおよびその製造方法
JPH0471344B2 (enExample)
JP2004516160A (ja) マイクロメカニックス構成素子及びその製造方法
JPS62502645A (ja) シ−ル型空胴の半導体による圧力トランスジユ−サ及び圧力変換方法
JPH01282839A (ja) 素子分離の製造方法
CN108760100A (zh) 一种差压压力传感器的制备方法
JP3276146B2 (ja) 半導体装置及びその製造方法
JP3290047B2 (ja) 加速度センサ及びその製造方法
JP4845308B2 (ja) 半導体センサ及びその製造方法
JP2701845B2 (ja) シリコン薄膜の製造方法
JPS63308390A (ja) 半導体圧力センサの製造方法
US5674406A (en) Stopper manufacturing method of a silicon micromachining structure
JP3551745B2 (ja) 半導体加速度センサの製造方法
JPH06221945A (ja) 半導体圧力センサおよびその製造方法
JPS6037177A (ja) 半導体圧力センサ
JP2936926B2 (ja) 半導体加速度センサ
JP2551439B2 (ja) 半導体装置の製造方法
JPH1140820A (ja) 半導体力学量センサの製造方法
JP3478896B2 (ja) 加速度センサ及びその製造方法
JPS6092672A (ja) 加速度センサの製造方法