JPS6092671A - 半導体加速度センサの製造方法 - Google Patents

半導体加速度センサの製造方法

Info

Publication number
JPS6092671A
JPS6092671A JP58201196A JP20119683A JPS6092671A JP S6092671 A JPS6092671 A JP S6092671A JP 58201196 A JP58201196 A JP 58201196A JP 20119683 A JP20119683 A JP 20119683A JP S6092671 A JPS6092671 A JP S6092671A
Authority
JP
Japan
Prior art keywords
silicon
silicon layer
type
substrate
porous silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58201196A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0471344B2 (enExample
Inventor
Akinobu Satou
佐藤　倬暢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toko Inc filed Critical Toko Inc
Priority to JP58201196A priority Critical patent/JPS6092671A/ja
Publication of JPS6092671A publication Critical patent/JPS6092671A/ja
Publication of JPH0471344B2 publication Critical patent/JPH0471344B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP58201196A 1983-10-27 1983-10-27 半導体加速度センサの製造方法 Granted JPS6092671A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58201196A JPS6092671A (ja) 1983-10-27 1983-10-27 半導体加速度センサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58201196A JPS6092671A (ja) 1983-10-27 1983-10-27 半導体加速度センサの製造方法

Publications (2)

Publication Number Publication Date
JPS6092671A true JPS6092671A (ja) 1985-05-24
JPH0471344B2 JPH0471344B2 (enExample) 1992-11-13

Family

ID=16436933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58201196A Granted JPS6092671A (ja) 1983-10-27 1983-10-27 半導体加速度センサの製造方法

Country Status (1)

Country Link
JP (1) JPS6092671A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174978A (ja) * 1985-10-08 1987-07-31 Nippon Denso Co Ltd 半導体振動・加速度検出装置
JPS6450532A (en) * 1987-08-21 1989-02-27 Tokai Rika Co Ltd Manufacture of silicon thin film
JPH06163938A (ja) * 1993-09-02 1994-06-10 Nippondenso Co Ltd 半導体振動・加速度検出装置
JPH088445A (ja) * 1993-12-24 1996-01-12 Kyung Buk Univ Sensor Technol Inst ８個のビームを有するブリッジ型シリコン加速度センサーの製造方法および該製造方法により製造される加速度センサー
CN110161282A (zh) * 2019-05-22 2019-08-23 龙微科技无锡有限公司 基于son结构的压阻式加速度传感器的制作方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62174978A (ja) * 1985-10-08 1987-07-31 Nippon Denso Co Ltd 半導体振動・加速度検出装置
JPS6450532A (en) * 1987-08-21 1989-02-27 Tokai Rika Co Ltd Manufacture of silicon thin film
JPH06163938A (ja) * 1993-09-02 1994-06-10 Nippondenso Co Ltd 半導体振動・加速度検出装置
JPH088445A (ja) * 1993-12-24 1996-01-12 Kyung Buk Univ Sensor Technol Inst ８個のビームを有するブリッジ型シリコン加速度センサーの製造方法および該製造方法により製造される加速度センサー
CN110161282A (zh) * 2019-05-22 2019-08-23 龙微科技无锡有限公司 基于son结构的压阻式加速度传感器的制作方法
CN110161282B (zh) * 2019-05-22 2021-03-30 龙微科技无锡有限公司 基于son结构的压阻式加速度传感器的制作方法

Also Published As

Publication number Publication date
JPH0471344B2 (enExample) 1992-11-13

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