JPH053923Y2 - - Google Patents
Info
- Publication number
- JPH053923Y2 JPH053923Y2 JP13703387U JP13703387U JPH053923Y2 JP H053923 Y2 JPH053923 Y2 JP H053923Y2 JP 13703387 U JP13703387 U JP 13703387U JP 13703387 U JP13703387 U JP 13703387U JP H053923 Y2 JPH053923 Y2 JP H053923Y2
- Authority
- JP
- Japan
- Prior art keywords
- chip
- holding surface
- microscope
- angle
- chips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007689 inspection Methods 0.000 claims description 11
- 230000003287 optical effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13703387U JPH053923Y2 (OSRAM) | 1987-09-08 | 1987-09-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13703387U JPH053923Y2 (OSRAM) | 1987-09-08 | 1987-09-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6442404U JPS6442404U (OSRAM) | 1989-03-14 |
| JPH053923Y2 true JPH053923Y2 (OSRAM) | 1993-01-29 |
Family
ID=31398096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13703387U Expired - Lifetime JPH053923Y2 (OSRAM) | 1987-09-08 | 1987-09-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH053923Y2 (OSRAM) |
-
1987
- 1987-09-08 JP JP13703387U patent/JPH053923Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6442404U (OSRAM) | 1989-03-14 |
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