JPH0538527Y2 - - Google Patents

Info

Publication number
JPH0538527Y2
JPH0538527Y2 JP1984199347U JP19934784U JPH0538527Y2 JP H0538527 Y2 JPH0538527 Y2 JP H0538527Y2 JP 1984199347 U JP1984199347 U JP 1984199347U JP 19934784 U JP19934784 U JP 19934784U JP H0538527 Y2 JPH0538527 Y2 JP H0538527Y2
Authority
JP
Japan
Prior art keywords
stage
sample
drive mechanism
pressure
rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984199347U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61114755U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984199347U priority Critical patent/JPH0538527Y2/ja
Publication of JPS61114755U publication Critical patent/JPS61114755U/ja
Application granted granted Critical
Publication of JPH0538527Y2 publication Critical patent/JPH0538527Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1984199347U 1984-12-28 1984-12-28 Expired - Lifetime JPH0538527Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984199347U JPH0538527Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984199347U JPH0538527Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61114755U JPS61114755U (enrdf_load_stackoverflow) 1986-07-19
JPH0538527Y2 true JPH0538527Y2 (enrdf_load_stackoverflow) 1993-09-29

Family

ID=30759184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984199347U Expired - Lifetime JPH0538527Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0538527Y2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3667884B2 (ja) * 1996-06-27 2005-07-06 Ｊｆｅスチール株式会社 局所分析装置
JP2000021345A (ja) * 1998-07-06 2000-01-21 Hitachi Ltd 走査型電子顕微鏡
JP3865752B2 (ja) * 2005-03-18 2007-01-10 Ｊｆｅスチール株式会社 局所分析装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS583586B2 (ja) * 1977-03-30 1983-01-21 株式会社日立製作所 走査形電子顕微鏡
JPS59194043U (ja) * 1983-06-09 1984-12-24 セイコーインスツルメンツ株式会社 除振支持装置

Also Published As

Publication number Publication date
JPS61114755U (enrdf_load_stackoverflow) 1986-07-19

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