JPS61114755U - - Google Patents

Info

Publication number
JPS61114755U
JPS61114755U JP19934784U JP19934784U JPS61114755U JP S61114755 U JPS61114755 U JP S61114755U JP 19934784 U JP19934784 U JP 19934784U JP 19934784 U JP19934784 U JP 19934784U JP S61114755 U JPS61114755 U JP S61114755U
Authority
JP
Japan
Prior art keywords
stage
rod
drive mechanism
sample chamber
pressurized fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19934784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0538527Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984199347U priority Critical patent/JPH0538527Y2/ja
Publication of JPS61114755U publication Critical patent/JPS61114755U/ja
Application granted granted Critical
Publication of JPH0538527Y2 publication Critical patent/JPH0538527Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1984199347U 1984-12-28 1984-12-28 Expired - Lifetime JPH0538527Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984199347U JPH0538527Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984199347U JPH0538527Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61114755U true JPS61114755U (enrdf_load_stackoverflow) 1986-07-19
JPH0538527Y2 JPH0538527Y2 (enrdf_load_stackoverflow) 1993-09-29

Family

ID=30759184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984199347U Expired - Lifetime JPH0538527Y2 (enrdf_load_stackoverflow) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0538527Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1021863A (ja) * 1996-06-27 1998-01-23 Kawasaki Steel Corp 局所分析装置
JP2000021345A (ja) * 1998-07-06 2000-01-21 Hitachi Ltd 走査型電子顕微鏡
JP2005209658A (ja) * 2005-03-18 2005-08-04 Jfe Steel Kk 局所分析装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120258A (en) * 1977-03-30 1978-10-20 Hitachi Ltd Scan-type electronic microscope
JPS59194043U (ja) * 1983-06-09 1984-12-24 セイコーインスツルメンツ株式会社 除振支持装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120258A (en) * 1977-03-30 1978-10-20 Hitachi Ltd Scan-type electronic microscope
JPS59194043U (ja) * 1983-06-09 1984-12-24 セイコーインスツルメンツ株式会社 除振支持装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1021863A (ja) * 1996-06-27 1998-01-23 Kawasaki Steel Corp 局所分析装置
JP2000021345A (ja) * 1998-07-06 2000-01-21 Hitachi Ltd 走査型電子顕微鏡
JP2005209658A (ja) * 2005-03-18 2005-08-04 Jfe Steel Kk 局所分析装置

Also Published As

Publication number Publication date
JPH0538527Y2 (enrdf_load_stackoverflow) 1993-09-29

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