JPS61114755U - - Google Patents

Info

Publication number
JPS61114755U
JPS61114755U JP19934784U JP19934784U JPS61114755U JP S61114755 U JPS61114755 U JP S61114755U JP 19934784 U JP19934784 U JP 19934784U JP 19934784 U JP19934784 U JP 19934784U JP S61114755 U JPS61114755 U JP S61114755U
Authority
JP
Japan
Prior art keywords
stage
rod
drive mechanism
sample chamber
pressurized fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19934784U
Other languages
Japanese (ja)
Other versions
JPH0538527Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984199347U priority Critical patent/JPH0538527Y2/ja
Publication of JPS61114755U publication Critical patent/JPS61114755U/ja
Application granted granted Critical
Publication of JPH0538527Y2 publication Critical patent/JPH0538527Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の一実施例を示す構成略図、第
２図は本考案で使用されるステージの側面図、第
３図は従来例を示す図である。 １：試料室、２：試料、３：集束レンズ、４：
移動体、５：ステージ、６：板体、７：ケース、
８，９，１０：摘子、１１：棒体、１２：ボール
、１３：シリンダ、１４：ピストン、１６：弁、
１７：パイプ、１８：コンプレツサ、１９：圧力
調整器、２０：リーク弁、２１：スプリングコイ
ル。 FIG. 1 is a schematic configuration diagram showing an embodiment of the present invention, FIG. 2 is a side view of a stage used in the present invention, and FIG. 3 is a diagram showing a conventional example. 1: Sample chamber, 2: Sample, 3: Focusing lens, 4:
Moving body, 5: Stage, 6: Plate body, 7: Case,
8, 9, 10: knob, 11: rod, 12: ball, 13: cylinder, 14: piston, 16: valve,
17: Pipe, 18: Compressor, 19: Pressure regulator, 20: Leak valve, 21: Spring coil.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空に保たれた試料室と、該試料室内の側壁に
一端が上下動可能に取付けられたステージと、該
ステージ上に載置され、試料を水平移動させるた
めの移動体と、前記ステージの他端下面に当接し
た棒体と、該棒体を介して前記ステージに下方か
ら押圧力を与えるためのシリンダ及びピストンか
らなる流体駆動機構と、該流体駆動機構内に加圧
流体を供給する手段と、該供給手段からの加圧流
体の圧力を調整するための手段とからなる走査電
子顕微鏡等における試料装置。 A sample chamber kept in a vacuum, a stage whose one end is attached to a side wall of the sample chamber so as to be movable up and down, a moving body placed on the stage to horizontally move the sample, and other parts of the stage. A fluid drive mechanism consisting of a rod in contact with a lower end surface, a cylinder and a piston for applying a pressing force to the stage from below via the rod, and means for supplying pressurized fluid into the fluid drive mechanism. and means for adjusting the pressure of the pressurized fluid from the supply means.
JP1984199347U 1984-12-28 1984-12-28 Expired - Lifetime JPH0538527Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984199347U JPH0538527Y2 (en) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984199347U JPH0538527Y2 (en) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61114755U true JPS61114755U (en) 1986-07-19
JPH0538527Y2 JPH0538527Y2 (en) 1993-09-29

Family

ID=30759184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984199347U Expired - Lifetime JPH0538527Y2 (en) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0538527Y2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1021863A (en) * 1996-06-27 1998-01-23 Kawasaki Steel Corp Local analyzer
JP2000021345A (en) * 1998-07-06 2000-01-21 Hitachi Ltd Scanning type electron microscope
JP2005209658A (en) * 2005-03-18 2005-08-04 Jfe Steel Kk Local analysis instrument

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120258A (en) * 1977-03-30 1978-10-20 Hitachi Ltd Scan-type electronic microscope
JPS59194043U (en) * 1983-06-09 1984-12-24 セイコーインスツルメンツ株式会社 Vibration isolation support device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53120258A (en) * 1977-03-30 1978-10-20 Hitachi Ltd Scan-type electronic microscope
JPS59194043U (en) * 1983-06-09 1984-12-24 セイコーインスツルメンツ株式会社 Vibration isolation support device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1021863A (en) * 1996-06-27 1998-01-23 Kawasaki Steel Corp Local analyzer
JP2000021345A (en) * 1998-07-06 2000-01-21 Hitachi Ltd Scanning type electron microscope
JP2005209658A (en) * 2005-03-18 2005-08-04 Jfe Steel Kk Local analysis instrument

Also Published As

Publication number Publication date
JPH0538527Y2 (en) 1993-09-29

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