JPH0534106Y2 - - Google Patents

Info

Publication number
JPH0534106Y2
JPH0534106Y2 JP5701486U JP5701486U JPH0534106Y2 JP H0534106 Y2 JPH0534106 Y2 JP H0534106Y2 JP 5701486 U JP5701486 U JP 5701486U JP 5701486 U JP5701486 U JP 5701486U JP H0534106 Y2 JPH0534106 Y2 JP H0534106Y2
Authority
JP
Japan
Prior art keywords
pattern
pitch
index
caliper
matching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP5701486U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62168642U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5701486U priority Critical patent/JPH0534106Y2/ja
Publication of JPS62168642U publication Critical patent/JPS62168642U/ja
Application granted granted Critical
Publication of JPH0534106Y2 publication Critical patent/JPH0534106Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length-Measuring Instruments Using Mechanical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5701486U 1986-04-15 1986-04-15 Expired - Lifetime JPH0534106Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5701486U JPH0534106Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-15 1986-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5701486U JPH0534106Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-15 1986-04-15

Publications (2)

Publication Number Publication Date
JPS62168642U JPS62168642U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-10-26
JPH0534106Y2 true JPH0534106Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-08-30

Family

ID=30886337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5701486U Expired - Lifetime JPH0534106Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-04-15 1986-04-15

Country Status (1)

Country Link
JP (1) JPH0534106Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS62168642U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-10-26

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