JPH0533855Y2 - - Google Patents
Info
- Publication number
- JPH0533855Y2 JPH0533855Y2 JP1985168456U JP16845685U JPH0533855Y2 JP H0533855 Y2 JPH0533855 Y2 JP H0533855Y2 JP 1985168456 U JP1985168456 U JP 1985168456U JP 16845685 U JP16845685 U JP 16845685U JP H0533855 Y2 JPH0533855 Y2 JP H0533855Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- air outlet
- air
- clean room
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009423 ventilation Methods 0.000 claims description 25
- 238000009792 diffusion process Methods 0.000 claims description 15
- 230000000903 blocking effect Effects 0.000 claims description 8
- 230000003749 cleanliness Effects 0.000 description 8
- 239000000428 dust Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000004080 punching Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000007664 blowing Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000011045 prefiltration Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Duct Arrangements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985168456U JPH0533855Y2 (US07709020-20100504-C00041.png) | 1985-11-02 | 1985-11-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985168456U JPH0533855Y2 (US07709020-20100504-C00041.png) | 1985-11-02 | 1985-11-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6277742U JPS6277742U (US07709020-20100504-C00041.png) | 1987-05-18 |
| JPH0533855Y2 true JPH0533855Y2 (US07709020-20100504-C00041.png) | 1993-08-27 |
Family
ID=31101347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985168456U Expired - Lifetime JPH0533855Y2 (US07709020-20100504-C00041.png) | 1985-11-02 | 1985-11-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0533855Y2 (US07709020-20100504-C00041.png) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4721992U (US07709020-20100504-C00041.png) * | 1971-03-13 | 1972-11-11 | ||
| JPS54162841A (en) * | 1978-06-13 | 1979-12-24 | Mitsubishi Electric Corp | Structure of admission port |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6093222U (ja) * | 1983-11-30 | 1985-06-25 | 松下電工株式会社 | 空調付照明装置 |
-
1985
- 1985-11-02 JP JP1985168456U patent/JPH0533855Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4721992U (US07709020-20100504-C00041.png) * | 1971-03-13 | 1972-11-11 | ||
| JPS54162841A (en) * | 1978-06-13 | 1979-12-24 | Mitsubishi Electric Corp | Structure of admission port |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6277742U (US07709020-20100504-C00041.png) | 1987-05-18 |
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