JPH0533855Y2 - - Google Patents

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a clean room air outlet that is applied to a turbulent flow clean room.

(Prior art) Regarding the structure of conventional clean room air outlets used in turbulent flow clean rooms, the seventh
This will be explained based on FIGS.

In FIG. 8, 10 is the outlet body, 11 is an air supply port connected to a duct not shown, 12 is a HEPA filter, and 13 is a diffusion plate. The air that passes through a pre-filter and a medium-performance filter (not shown) and is supplied from the air supply port 11 to the HEPA filter 12 is supplied as clean air into the clean room by the diffusion plate 13, where it mixes with indoor air. Maintains cleanliness by diluting dust in indoor air.

The diffuser plate 13 conventionally used here is the seventh
The structures shown in Figures A, B, and C are generally adopted.

The air outlet of the diffuser plate 13' shown in FIG.
is a short side plate, 13'd is a bottom plate, and the cross-sectional shape of the air passage is trapezoidal. The air outlet of the diffuser plate 13'' shown in FIG.
13"c is a long side plate, 13"c is a short side plate, and 13''d is a bottom plate, and the cross-sectional shape of the air passage is rectangular. The air outlet of the diffuser plate 14 shown in FIG. In each figure, a mesh mark indicates a punching plate having through holes. In any of the diffusion plates 13', 13'', 14, each side plate 13'b, 13''b, 14b, 13'c, 1
3″c, 14c and each bottom plate 13′d, 13″d,
A punching plate is used for 14d. Then, the clean air flow from the HEPA filter 12 is transmitted to the bottom plates 13'd, 13''d, 14 of the diffuser plate.
The direction is mainly perpendicular to d.

(Problems to be solved by the invention) Since the conventional clean room air outlet uses the above-mentioned diffusion plate, the following problems have arisen.

(a) As a diffusion plate, the effect of supplying clean air to the left and right sides is small, and the airflow is mainly blown out directly below the outlet.

(b) An airflow stagnation area is created between the air outlets or between the air outlet and the wall surface.

(c) Draft occurs because the downward blowing wind speed is high.

For this reason, the cleanliness of the clean room was significantly lower than the theoretical value of perfect diffusion.

(Means for Solving the Problems) The present invention has been made in view of the above circumstances, and its configuration is as follows.

In a clean room outlet with a HEPA filter built into the outlet body, the outlet is rectangular, with a ventilation hole provided on the side plate, and a closing plate part along the longitudinal side plate on the bottom plate to close the ventilation hole. This air outlet for a clean room is provided with a plurality of slit-shaped diffusion plates arranged alternately with plate parts at the lower end of the outlet body.

As an embodiment, in a diffuser plate in which the air outlet is rectangular and has ventilation holes in the side plate, a closing plate part is also provided on the side plate (A), or the ventilation hole part and the closing plate part (B) are provided at equal intervals. It includes a clean room air outlet using a diffuser plate.

(Function) Therefore, the clean air flow that has passed through the HEPA filter is bent laterally at the closing plate part provided on the bottom plate along the side plates of the diffuser plate, and the closing plate part in the middle of the bottom plate It acts as a resistance to the downward airflow and equalizes the flow velocity.

(Example) An example of the clean room air outlet according to the present invention will be described based on FIGS. 1 to 4 and with reference to FIG. 8.

FIGS. 1A, 1B, and 1C show a diffusion plate 3 used in a first embodiment of a clean room air outlet according to the present invention. Reference numeral 3a denotes a mounting portion to the lower end of the outlet main body 10 shown in FIG. 8, the air inlet 3a' is rectangular, and the air passage has a trapezoidal cross-section. Each 3b is a long-side side plate, and each 3c is a short-side side plate, and both are formed of punching plates having ventilation holes. 3d is a bottom plate, in which blocking plate portions 3d 0 and 3d 0 are provided along the long side plates 3b and 3b in the longitudinal direction of the air inlet 3a', and a blocking plate portion 3d ₀ and 3d ₀ is provided in the middle portion in the same direction as the blocking plate portion 3d ₀ . Ventilation hole portions 3d' and closing plate portions 3d ₀ ' having equal width are alternately provided to form a plurality of slit shapes. Note that the ventilation hole portion 3d' and the closing plate portion 3d ₀ ' may be formed by using the bottom plate 3d as a punching plate and closing the closing plate portion 3d ₀ ' with a closing plate.

Such a diffuser plate 3, as shown in FIG.
Air outlet body 1 with built-in HEPA filter 12
It is attached to the descending part of 0 and constitutes a clean room air outlet.

Next, the effect will be explained.

The air supplied into the outlet body 10 in the same manner as in the conventional example is purified by a HEPA filter 12, and is passed from the air inlet 3a' of the diffuser plate to the ventilation hole 3d' of the bottom plate, the long side plates 3b, 3b, and Short side plate 3c,
It is supplied into the clean room through the ventilation hole 3c. At this time, a part of the clean air flow flows along the long side plates 3b, 3b, which are one of the side plates, to the both closing plate parts 3.
d ₀ , 3d ₀ and is bent toward the long side plates 3b, 3b, and the blocking plate portion 3d ₀ ' in the middle of the bottom plate acts as a resistance to the airflow, making the bottom plate 3
The airflow supplied downward into the clean room from d is weakened, and the proportion of the amount of clean air supplied into the room from the long side plates 3b increases. Note that the slit-shaped outlet attracts surrounding air to promote the cleaning action.

FIG. 2 shows a diffuser plate 3' used in a second embodiment of the present invention. 3'a is a mounting part, each 3'b is a long side plate formed by a punching plate having ventilation holes, and each _3'd0 is a closure at both ends provided on the bottom plate along both long side side plates 3'b. The plate parts 3'd' and 3'd ₀ ' are ventilation hole parts and closing plate parts provided alternately on the bottom plate, and form a plurality of slit shapes. The closing plate parts 3'd ₀ , 3'd ₀ at both ends, each ventilation hole part 3'd' and the closing plate part 3'd ₀ ' are connected to both short side side plates 3'c, 3'c, respectively.
It extends to form closing plate portions 3'c ₀ , 3'c ₀ at both ends and alternately provided ventilation hole portions 3'c' and closing plate portions 3'c ₀ '. Such a diffuser plate 3'
is attached to the outlet main body 10 in the same manner as the first embodiment to constitute the second embodiment.

Therefore, compared with the first embodiment, both short side plates 3'c,
It works in much the same way, except that the clean air flow to side 3'c is restricted.

Figure 3 A, B, and C show a diffuser plate 3'' used in the third embodiment of the present invention. 3''a is the outlet main body 1
Attachment part to the lower end of 0, each 3"b is the long side plate, each 3"c is the short side plate, 3"d is the bottom plate, each 3"d ₀ is the long side plate 3"b, 3"b The closing plate portions 3''d' along the line are ventilation hole portions, and _3''d'0 ' are closing plate portions provided alternately with the ventilation hole portions 3''d', forming a plurality of slit shapes. The first except that the cross-sectional shape of the air flow path is rectangular.
This is no different from the diffuser plate 3 provided in the embodiment. A third embodiment is constructed by attaching such a diffusion plate 3'' to the lower end of the outlet body 10.

Therefore, the operation of the third embodiment is substantially the same as that of the second embodiment.

FIG. 4 shows a diffuser plate 3 used in a fourth embodiment of the present invention. Both 3a are attachment parts to the lower end of the outlet body 10. Both short side plates 3c, 3
It is the same as the diffuser plate 3'' except that the attachment part on the c side is omitted. Such a diffuser plate 3 is joined in the longitudinal direction and attached to the elongated outlet body 10 to constitute the fourth embodiment.

Therefore, the operation of the fourth embodiment is substantially the same as that of the third embodiment.

Next, test results of clean room outlet A using the conventional diffuser plate 14 shown in FIG. 7C and clean room outlet B using the diffuser plate 3 according to the present invention will be described.

Figure 5A shows the indoor equipment arrangement of the test room A where two clean room air outlets A using diffuser plates 14 are installed on the ceiling, and Figure 5B shows the indoor equipment arrangement of two clean room air outlets A using diffuser plates 3. The indoor equipment arrangement for test B with air outlet B installed on the ceiling is shown, and in both cases,
The air outlet center spacing and the total air inlet area of the diffuser plate are the same. In addition, each 20 in the figure shows an exhaust hole.

Then, air with a dust generation rate of 600,000 particles/minute was supplied to the center of the room, and the indoor cleanliness (dust/dust) was measured at 104 locations every 15, 35, and 50 times per hour. ft ³ ), that is, the amount of dust per cubic foot, the results shown in FIG. 6 were obtained. In other words, the horizontal axis in Figure 6 is the number of ventilations (times/
The vertical axis indicates indoor cleanliness (units/ ^ft3 ),
The lines show the results of Test A, the lines show the results of Test B, and the lines show the calculated values.

As can be seen from the figure, indoor cleanliness was significantly improved by using the clean room air outlet according to the present invention.

(Effects of the invention) The bottom plate of the diffuser plate of the clean room air outlet according to the invention has a plurality of slit shapes in which blocking plate parts and ventilation hole parts are provided alternately, and the structure is simple, and It has the following effects.

(1) Since the airflow is distributed horizontally compared to the conventional model, the downward airflow velocity is reduced, and drafts on the work surface are no longer generated.

(2) The downward airflow velocity was reduced, and therefore the rise of the airflow that hit the floor was also small, making it possible to suppress the dust on the floor from dispersing into the room.

(3) The clean air from the ceiling surface is mainly a nearly uniform downward airflow to the floor surface, and compared to the conventional example where the amount of air blown out to the sides is small, the room air is not agitated. In addition, since the surrounding air is attracted and transported, the indoor cleanliness level is higher even with the same number of ventilations.In order to obtain the same level of cleanliness as before, the number of air outlets must be reduced or the number of ventilations must be reduced. It was possible to reduce the power cost of the fan.

(4) In general, according to an air outlet that blows air downward and to the sides, the air flowing downward from the filter toward the bottom plate is influenced by the flow toward the sides, and the closer to the periphery of the bottom plate the air is tilted to the side. Becomes a streamline.

However, according to the conventional air outlet in which a large number of ventilation holes are scattered on the bottom plate and uniform air is discharged downward over the entire surface, the bottom plate functions as a single air outlet,
The numerous vents function as air outlets, and adjacent pieces of air blown out from the numerous vents interact with each other and quickly coalesce, causing the properties of independent airflow to be quickly lost, causing air to flow from the entire surface of the bottom plate. It becomes a downward flow with uniform and average wind speed. the result,
The airflow from the bottom plate is directed downward almost straight, and its ability to attract surrounding air is also extremely weak.

On the other hand, according to the present invention, a plurality of slit-shaped diffusion plates are provided by alternately providing ventilation hole portions and blocking plate portions on the bottom plate, and the distance between adjacent ventilation hole portions is reduced by a plurality of slit-shaped diffusion plates. Since the slits can be made larger than the conventional method in which the pores are scattered, each slit functions as an independent air outlet, and the same effect as when a plurality of air outlets are provided on the bottom plate can be obtained. That is, air currents corresponding to the number of slits are generated, each air current moves while attracting indoor air between adjacent air currents, and the flow velocity gradually decreases. In this way, the airflow from adjacent slits hardly affects the airflow, and since each slit maintains its properties as an independent airflow, the initial direction of airflow from the bottom plate is maintained. The direction of the air blowing from the bottom plate is influenced by the flow flowing laterally within the air outlet body, so that the flow line is inclined laterally toward the peripheral edge of the bottom plate. As a result, together with the good attraction of indoor air between the independent airflows from each slit, dead zones are less likely to occur and the cleanliness of the room is significantly improved.

[Brief explanation of the drawing]

FIG. 1 shows a diffusion plate used in a first embodiment of a clean room air outlet according to the present invention.
Figure A is a bottom view, Figure B is a front view, Figure C is a side view, Figure 2 is a bottom view of the diffuser plate used in the second embodiment, and Figure 3 is the same as the third embodiment. Figure 3A is a bottom view, Figure 3B is a front view, Figure 3C is a side view, and Figure 4 is a bottom view of the diffusion plate used in the fourth embodiment. , FIG. 5A is a perspective view showing the equipment arrangement for a test using a conventional clean room outlet, and FIG. 5B shows a test using the first embodiment of the clean room outlet according to the present invention. 6 is a diagram showing the test results, FIG. 7 is a bottom view of a diffuser plate used in a conventional clean room air outlet, and FIG. 8 is a diagram showing the test results. FIG. 2 is a diagram showing a conventional clean room air outlet. 3, 3', 3'', 3, 13...diffusion plate, 3a,
3'a, 3''a, 3...Mounting part, 3b, 3'b,
3″b, 3b……long side plate, 3c, 3′c, 3″
c, 3c...Short side plate, 3d, 3'd, 3''d,
3d...Bottom plate, 3d ₀ , 3'd ₀ , 3″d ₀ , 3d ₀ ...
...Closing plate part (along the long side plate), 3d ₀ ′, 3′d ₀ ′,
3″d ₀ ′, 3d ₀ ′……(middle part) closing plate part, 3
d', 3'd', 3''d', 3d'...Vent hole portion.

Claims (1)

[Scope of Claim for Utility Model Registration] 1. In a clean room air outlet with a HEPA filter built into the air outlet body, the air outlet has a rectangular shape, a ventilation hole is provided in the side plate, and a bottom plate has a
For clean rooms, characterized in that a plurality of slit-shaped diffusion plates are provided at the lower end of the air outlet body, with the blocking plate portions running along the longitudinal side plates, and the ventilation holes and the blocking plate portions being alternately provided. Air outlet. 2. The air outlet for a clean room as set forth in claim 1 of the utility model registration, which has a closing plate portion on the side plate. 3. The air outlet for a clean room according to claim 1 or 2 of the utility model registration claim, in which the ventilation hole portion and the closing plate portion are provided at equal intervals.