JPH0531101B2 - - Google Patents
Info
- Publication number
- JPH0531101B2 JPH0531101B2 JP28984086A JP28984086A JPH0531101B2 JP H0531101 B2 JPH0531101 B2 JP H0531101B2 JP 28984086 A JP28984086 A JP 28984086A JP 28984086 A JP28984086 A JP 28984086A JP H0531101 B2 JPH0531101 B2 JP H0531101B2
- Authority
- JP
- Japan
- Prior art keywords
- data
- value
- defect
- streak
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 87
- 238000001514 detection method Methods 0.000 claims description 33
- 230000010354 integration Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 7
- 230000002950 deficient Effects 0.000 description 6
- 238000007689 inspection Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28984086A JPS63142241A (ja) | 1986-12-05 | 1986-12-05 | 筋状欠陥弁別処理回路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP28984086A JPS63142241A (ja) | 1986-12-05 | 1986-12-05 | 筋状欠陥弁別処理回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63142241A JPS63142241A (ja) | 1988-06-14 |
JPH0531101B2 true JPH0531101B2 (fr) | 1993-05-11 |
Family
ID=17748447
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP28984086A Granted JPS63142241A (ja) | 1986-12-05 | 1986-12-05 | 筋状欠陥弁別処理回路 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63142241A (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008175549A (ja) * | 2007-01-16 | 2008-07-31 | Olympus Corp | 欠陥検出装置および欠陥検出方法 |
-
1986
- 1986-12-05 JP JP28984086A patent/JPS63142241A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS63142241A (ja) | 1988-06-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |