JPH0527938B2 - - Google Patents
Info
- Publication number
- JPH0527938B2 JPH0527938B2 JP60059853A JP5985385A JPH0527938B2 JP H0527938 B2 JPH0527938 B2 JP H0527938B2 JP 60059853 A JP60059853 A JP 60059853A JP 5985385 A JP5985385 A JP 5985385A JP H0527938 B2 JPH0527938 B2 JP H0527938B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- analysis
- point
- analysis point
- analyzed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004458 analytical method Methods 0.000 claims description 87
- 238000010884 ion-beam technique Methods 0.000 claims description 16
- 150000002500 ions Chemical class 0.000 claims description 14
- 238000004949 mass spectrometry Methods 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000011953 bioanalysis Methods 0.000 description 1
- 230000004397 blinking Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000000921 elemental analysis Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60059853A JPS61218057A (ja) | 1985-03-25 | 1985-03-25 | イオンマイクロアナライザ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60059853A JPS61218057A (ja) | 1985-03-25 | 1985-03-25 | イオンマイクロアナライザ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61218057A JPS61218057A (ja) | 1986-09-27 |
| JPH0527938B2 true JPH0527938B2 (zh) | 1993-04-22 |
Family
ID=13125164
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60059853A Granted JPS61218057A (ja) | 1985-03-25 | 1985-03-25 | イオンマイクロアナライザ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61218057A (zh) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5292786A (en) * | 1976-01-30 | 1977-08-04 | Hitachi Ltd | Ion microanalyzer |
| JPS5328488A (en) * | 1976-08-30 | 1978-03-16 | Hitachi Ltd | Specimen analyzer |
| JPS5875749A (ja) * | 1981-10-30 | 1983-05-07 | Shimadzu Corp | 荷電粒子線分析装置の試料位置表示装置 |
-
1985
- 1985-03-25 JP JP60059853A patent/JPS61218057A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5292786A (en) * | 1976-01-30 | 1977-08-04 | Hitachi Ltd | Ion microanalyzer |
| JPS5328488A (en) * | 1976-08-30 | 1978-03-16 | Hitachi Ltd | Specimen analyzer |
| JPS5875749A (ja) * | 1981-10-30 | 1983-05-07 | Shimadzu Corp | 荷電粒子線分析装置の試料位置表示装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61218057A (ja) | 1986-09-27 |
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