JPH0527598B2 - - Google Patents

Info

Publication number
JPH0527598B2
JPH0527598B2 JP62236755A JP23675587A JPH0527598B2 JP H0527598 B2 JPH0527598 B2 JP H0527598B2 JP 62236755 A JP62236755 A JP 62236755A JP 23675587 A JP23675587 A JP 23675587A JP H0527598 B2 JPH0527598 B2 JP H0527598B2
Authority
JP
Japan
Prior art keywords
susceptor
gas
hemisphere
growth chamber
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62236755A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6479097A (en
Inventor
Shigenori Takagishi
Hideki Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Sumitomo Electric Industries Ltd
Original Assignee
Nissin Electric Co Ltd
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd, Sumitomo Electric Industries Ltd filed Critical Nissin Electric Co Ltd
Priority to JP62236755A priority Critical patent/JPS6479097A/ja
Publication of JPS6479097A publication Critical patent/JPS6479097A/ja
Publication of JPH0527598B2 publication Critical patent/JPH0527598B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP62236755A 1987-09-21 1987-09-21 Compound semiconductor vapor growth device Granted JPS6479097A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62236755A JPS6479097A (en) 1987-09-21 1987-09-21 Compound semiconductor vapor growth device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62236755A JPS6479097A (en) 1987-09-21 1987-09-21 Compound semiconductor vapor growth device

Publications (2)

Publication Number Publication Date
JPS6479097A JPS6479097A (en) 1989-03-24
JPH0527598B2 true JPH0527598B2 (enExample) 1993-04-21

Family

ID=17005310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62236755A Granted JPS6479097A (en) 1987-09-21 1987-09-21 Compound semiconductor vapor growth device

Country Status (1)

Country Link
JP (1) JPS6479097A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10043601A1 (de) * 2000-09-01 2002-03-14 Aixtron Ag Vorrichtung und Verfahren zum Abscheiden insbesondere kristalliner Schichten auf insbesondere kristallinen Substraten
JP2002261030A (ja) * 2001-03-02 2002-09-13 Sumitomo Chem Co Ltd ３−５族化合物半導体エピタキシャル成長方法及び装置
US7968362B2 (en) 2001-03-27 2011-06-28 Ricoh Company, Ltd. Semiconductor light-emitting device, surface-emission laser diode, and production apparatus thereof, production method, optical module and optical telecommunication system
US10343283B2 (en) 2010-05-24 2019-07-09 Intouch Technologies, Inc. Telepresence robot system that can be accessed by a cellular phone
WO2013176758A1 (en) 2012-05-22 2013-11-28 Intouch Technologies, Inc. Clinical workflows utilizing autonomous and semi-autonomous telemedicine devices

Also Published As

Publication number Publication date
JPS6479097A (en) 1989-03-24

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