JPH05275763A - 強誘電性セラミックディスクからなるアクチュエーター - Google Patents
強誘電性セラミックディスクからなるアクチュエーターInfo
- Publication number
- JPH05275763A JPH05275763A JP4325656A JP32565692A JPH05275763A JP H05275763 A JPH05275763 A JP H05275763A JP 4325656 A JP4325656 A JP 4325656A JP 32565692 A JP32565692 A JP 32565692A JP H05275763 A JPH05275763 A JP H05275763A
- Authority
- JP
- Japan
- Prior art keywords
- actuator
- disk
- disc
- ferroelectric
- conductive layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 20
- 238000009413 insulation Methods 0.000 claims description 10
- 238000007373 indentation Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000001465 metallisation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
- H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
- H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Joining Of Glass To Other Materials (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4140107 | 1991-12-05 | ||
DE4140107:7 | 1991-12-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05275763A true JPH05275763A (ja) | 1993-10-22 |
Family
ID=6446336
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4325656A Pending JPH05275763A (ja) | 1991-12-05 | 1992-12-04 | 強誘電性セラミックディスクからなるアクチュエーター |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0545391A1 (en, 2012) |
JP (1) | JPH05275763A (en, 2012) |
TW (1) | TW241363B (en, 2012) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006511951A (ja) * | 2002-12-23 | 2006-04-06 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 圧電アクチュエータ |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19946837A1 (de) * | 1999-09-30 | 2001-05-03 | Bosch Gmbh Robert | Piezoaktor |
FR2874663B1 (fr) * | 2004-08-31 | 2006-11-24 | Renault Sas | Dispositif de mise en vibration cyclique d'une buse d'injecteur |
EP1798782B1 (de) * | 2005-12-13 | 2008-11-26 | Continental Automotive GmbH | Piezoaktuator und Verfahren zum Herstellen eines Piezostapels |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3378393D1 (en) * | 1982-05-11 | 1988-12-08 | Nec Corp | Multilayer electrostrictive element which withstands repeated application of pulses |
AT382968B (de) * | 1983-12-28 | 1987-05-11 | Avl Verbrennungskraft Messtech | Piezoelektrisches messelement |
JPH0217860U (en, 2012) * | 1988-07-20 | 1990-02-06 |
-
1992
- 1992-11-10 TW TW081109005A patent/TW241363B/zh active
- 1992-12-02 EP EP92120583A patent/EP0545391A1/de not_active Withdrawn
- 1992-12-04 JP JP4325656A patent/JPH05275763A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006511951A (ja) * | 2002-12-23 | 2006-04-06 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 圧電アクチュエータ |
Also Published As
Publication number | Publication date |
---|---|
EP0545391A1 (de) | 1993-06-09 |
TW241363B (en, 2012) | 1995-02-21 |
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