JPH05264000A - 超高純度窒素の分配設備及びその使用方法 - Google Patents

超高純度窒素の分配設備及びその使用方法

Info

Publication number
JPH05264000A
JPH05264000A JP4302328A JP30232892A JPH05264000A JP H05264000 A JPH05264000 A JP H05264000A JP 4302328 A JP4302328 A JP 4302328A JP 30232892 A JP30232892 A JP 30232892A JP H05264000 A JPH05264000 A JP H05264000A
Authority
JP
Japan
Prior art keywords
ultra
purity nitrogen
high purity
nitrogen
distribution facility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4302328A
Other languages
English (en)
Japanese (ja)
Inventor
Francois Venet
ヴエネ・フランソワ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Publication of JPH05264000A publication Critical patent/JPH05264000A/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D5/00—Protection or supervision of installations
    • F17D5/02—Preventing, monitoring, or locating loss
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0138—Shape tubular
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
    • F17C2203/0634—Materials for walls or layers thereof
    • F17C2203/0636—Metals
    • F17C2203/0639—Steels
    • F17C2203/0643—Stainless steels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F17C2223/0161—Liquefied gas, e.g. LPG, GPL cryogenic, e.g. LNG, GNL, PLNG
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0642—Composition; Humidity
    • F17C2250/0647—Concentration of a product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Pipeline Systems (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
JP4302328A 1991-11-14 1992-11-12 超高純度窒素の分配設備及びその使用方法 Pending JPH05264000A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9114004 1991-11-14
FR9114004A FR2683890A1 (fr) 1991-11-14 1991-11-14 Installation de distribution d'azote a tres haute purete et procede de mise en óoeuvre.

Publications (1)

Publication Number Publication Date
JPH05264000A true JPH05264000A (ja) 1993-10-12

Family

ID=9418897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4302328A Pending JPH05264000A (ja) 1991-11-14 1992-11-12 超高純度窒素の分配設備及びその使用方法

Country Status (5)

Country Link
US (1) US5287873A (enExample)
JP (1) JPH05264000A (enExample)
CA (1) CA2082779C (enExample)
DE (1) DE4238436A1 (enExample)
FR (1) FR2683890A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112377815A (zh) * 2020-09-21 2021-02-19 烟台索高智能科技有限公司 一种粘稠液体分流阀

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5927325A (en) * 1996-10-25 1999-07-27 Inpod, Inc. Microelectromechanical machined array valve
US6148847A (en) * 1999-03-25 2000-11-21 The Boc Group, Inc. Low vapor pressure gas distribution system and method
DE102016112888A1 (de) 2016-07-13 2018-01-18 Truma Gerätetechnik GmbH & Co. KG Flüssiggasanlage

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210177A (ja) * 1982-05-26 1983-12-07 テクストロン・インコ−ポレイテツド 窒素酸化物の製造、移送又は貯蔵に用いられるステンレススチ−ル製装置の処理方法及び該方法を実施するための装置
JPS63161145A (ja) * 1986-12-25 1988-07-04 Nkk Corp クリ−ンル−ム用鋼管
JPS63307300A (ja) * 1987-06-09 1988-12-14 Nippon Sanso Kk 高純度ガス供給用ステンレススチール製マニホールドの製造方法
JPS63309325A (ja) * 1987-06-09 1988-12-16 Nippon Sanso Kk ステンレススチ−ル製ｕ字管の製造方法
JPH01122608A (ja) * 1987-11-06 1989-05-15 Nkk Corp 内面超平滑継目無管の製造方法
JPH01281138A (ja) * 1988-05-08 1989-11-13 Tadahiro Omi プロセスガス供給配管装置
JPH0331452A (ja) * 1989-06-29 1991-02-12 Nkk Corp クリーンルーム用鋼管

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4859375A (en) * 1986-12-29 1989-08-22 Air Products And Chemicals, Inc. Chemical refill system
EP0413835A1 (de) * 1989-08-08 1991-02-27 Siemens Aktiengesellschaft Behälter mit einem Reaktionsgefäss für Chemische Reaktionen und Verfahren zum Betreiben dieses Behälters
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210177A (ja) * 1982-05-26 1983-12-07 テクストロン・インコ−ポレイテツド 窒素酸化物の製造、移送又は貯蔵に用いられるステンレススチ−ル製装置の処理方法及び該方法を実施するための装置
JPS63161145A (ja) * 1986-12-25 1988-07-04 Nkk Corp クリ−ンル−ム用鋼管
JPS63307300A (ja) * 1987-06-09 1988-12-14 Nippon Sanso Kk 高純度ガス供給用ステンレススチール製マニホールドの製造方法
JPS63309325A (ja) * 1987-06-09 1988-12-16 Nippon Sanso Kk ステンレススチ−ル製ｕ字管の製造方法
JPH01122608A (ja) * 1987-11-06 1989-05-15 Nkk Corp 内面超平滑継目無管の製造方法
JPH01281138A (ja) * 1988-05-08 1989-11-13 Tadahiro Omi プロセスガス供給配管装置
JPH0331452A (ja) * 1989-06-29 1991-02-12 Nkk Corp クリーンルーム用鋼管

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112377815A (zh) * 2020-09-21 2021-02-19 烟台索高智能科技有限公司 一种粘稠液体分流阀

Also Published As

Publication number Publication date
FR2683890B1 (enExample) 1997-03-07
FR2683890A1 (fr) 1993-05-21
CA2082779C (fr) 2001-10-02
US5287873A (en) 1994-02-22
DE4238436A1 (enExample) 1993-05-19
CA2082779A1 (fr) 1993-05-15

Similar Documents

Publication Publication Date Title
US4917136A (en) Process gas supply piping system
EP0660030B1 (en) Purgeable connection for gas supply cabinet
US4869301A (en) Cylinder cabinet piping system
EP0473040B1 (en) System for delivery of reactive gases from a source of supply to a tool
US4508129A (en) Pipe repair bypass system
US5554226A (en) Heat treatment processing apparatus and cleaning method thereof
JP3684624B2 (ja) 反応ガス供給装置
JPH1028855A (ja) ガス供給装置及び気相成長用設備
JPH02284638A (ja) 高性能プロセスガス供給装置
JP2987754B2 (ja) 高純度ガスの配管路での不動態化処理方法
JPH01117318A (ja) 半導体用反応性気体精製方法
US7264013B2 (en) Enhanced purge effect in gas conduit
JP3607998B2 (ja) 減圧機能付き容器弁
US6536460B1 (en) Process line purge system and method
JPH0647073B2 (ja) プロセス装置用ガス供給配管装置
US5287873A (en) Installation and process for the distribution of very high purity nitrogen
US6422610B1 (en) Deformable fluid supply line
JPH05177126A (ja) 有害液体供給装置
JP2000306839A (ja) 半導体プロセスガスの供給システム
CN117967988A (zh) 四氯化钛管路输送系统及其控制方法
KR940007866B1 (ko) 기상성장장치
JPH01287277A (ja) Ｃｖｄ装置の原料ガス供給部
JPS627408A (ja) 真空プロセス装置用油回転ポンプ油循環浄化装置
JPH0627944Y2 (ja) 気相成長装置
JP2583601Y2 (ja) 高純度流体の移し換え装置