CA2082779A1 - Installation de distribution d'azote a tres haute purete et procede de mise en oeuvre - Google Patents

Installation de distribution d'azote a tres haute purete et procede de mise en oeuvre

Info

Publication number
CA2082779A1
CA2082779A1 CA002082779A CA2082779A CA2082779A1 CA 2082779 A1 CA2082779 A1 CA 2082779A1 CA 002082779 A CA002082779 A CA 002082779A CA 2082779 A CA2082779 A CA 2082779A CA 2082779 A1 CA2082779 A1 CA 2082779A1
Authority
CA
Canada
Prior art keywords
cmax
tubing
distribution system
high purity
purity nitrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002082779A
Other languages
English (en)
Other versions
CA2082779C (fr
Inventor
Francois Venet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2082779A1 publication Critical patent/CA2082779A1/fr
Application granted granted Critical
Publication of CA2082779C publication Critical patent/CA2082779C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/12—Arrangements or mounting of devices for preventing or minimising the effect of explosion ; Other safety measures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D5/00—Protection or supervision of installations
    • F17D5/02—Preventing, monitoring, or locating loss
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0138—Shape tubular
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2203/00—Vessel construction, in particular walls or details thereof
    • F17C2203/06—Materials for walls or layers thereof; Properties or structures of walls or their materials
    • F17C2203/0634—Materials for walls or layers thereof
    • F17C2203/0636—Metals
    • F17C2203/0639—Steels
    • F17C2203/0643—Stainless steels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146—Two-phase
    • F17C2223/0153—Liquefied gas, e.g. LPG, GPL
    • F17C2223/0161—Liquefied gas, e.g. LPG, GPL cryogenic, e.g. LNG, GNL, PLNG
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0642—Composition; Humidity
    • F17C2250/0647—Concentration of a product
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2931—Diverse fluid containing pressure systems
    • Y10T137/3115—Gas pressure storage over or displacement of liquid
    • Y10T137/3127—With gas maintenance or application
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Pipeline Systems (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)

Abstract

ABRÉGÉ DESCRIPTIF Les portions de tubulures de longueur L ayant une section linéaire S1 et véhiculant un débit volumique d'azote Q tel que, pour obtenir une concentration molaire en impuretés de dégazage inférieure à Cmax, on ait Q/S1 non inférieur à 9,5 x 10-9 L/Cmax, sont réalisées en acier inoxydable à faible teneur en carbone non électro-polies et/ou chimiquement traitées, les jonctions entre tubulures et/ou avec des organes actifs étant maintenues extérieurement dans une atmosphère neutre de protection confinée dans un boîtier étanche. Application notamment aux industries électroniques.
CA002082779A 1991-11-14 1992-11-12 Installation de distribution d'azote a tres haute purete et procede de mise en oeuvre Expired - Fee Related CA2082779C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9114004 1991-11-14
FR9114004A FR2683890A1 (fr) 1991-11-14 1991-11-14 Installation de distribution d'azote a tres haute purete et procede de mise en óoeuvre.

Publications (2)

Publication Number Publication Date
CA2082779A1 true CA2082779A1 (fr) 1993-05-15
CA2082779C CA2082779C (fr) 2001-10-02

Family

ID=9418897

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002082779A Expired - Fee Related CA2082779C (fr) 1991-11-14 1992-11-12 Installation de distribution d'azote a tres haute purete et procede de mise en oeuvre

Country Status (5)

Country Link
US (1) US5287873A (fr)
JP (1) JPH05264000A (fr)
CA (1) CA2082779C (fr)
DE (1) DE4238436A1 (fr)
FR (1) FR2683890A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5927325A (en) * 1996-10-25 1999-07-27 Inpod, Inc. Microelectromechanical machined array valve
US6148847A (en) * 1999-03-25 2000-11-21 The Boc Group, Inc. Low vapor pressure gas distribution system and method
DE102016112888A1 (de) 2016-07-13 2018-01-18 Truma Gerätetechnik GmbH & Co. KG Flüssiggasanlage
CN112377815B (zh) * 2020-09-21 2022-09-13 山东朗高计量泵科技有限公司 一种粘稠液体分流阀

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4432808A (en) * 1982-05-26 1984-02-21 Textron Inc. Treatment of stainless steel apparatus used in the manufacture, transport or storage of nitrogen oxides
US4859375A (en) * 1986-12-29 1989-08-22 Air Products And Chemicals, Inc. Chemical refill system
JPS63161145A (ja) * 1986-12-25 1988-07-04 Nkk Corp クリ−ンル−ム用鋼管
JPH0790272B2 (ja) * 1987-06-09 1995-10-04 日本酸素株式会社 ステンレススチ−ル製ｕ字管の製造方法
JP2678754B2 (ja) * 1987-06-09 1997-11-17 日本酸素株式会社 高純度ガス供給用ステンレススチール製マニホールドの製造方法
JPH0688049B2 (ja) * 1987-11-06 1994-11-09 日本鋼管株式会社 内面平滑性に優れた継目無管の製造方法
JPH0644986B2 (ja) * 1988-05-08 1994-06-15 忠弘 大見 プロセスガス供給配管装置
JP2676631B2 (ja) * 1989-06-29 1997-11-17 日本鋼管株式会社 クリーンルーム用鋼管
EP0413835A1 (fr) * 1989-08-08 1991-02-27 Siemens Aktiengesellschaft Réservoir avec récipient de réaction pour des réactions chimiques et procédé pour opérer ce réservoir
US5148945B1 (en) * 1990-09-17 1996-07-02 Applied Chemical Solutions Apparatus and method for the transfer and delivery of high purity chemicals

Also Published As

Publication number Publication date
FR2683890B1 (fr) 1997-03-07
JPH05264000A (ja) 1993-10-12
DE4238436A1 (fr) 1993-05-19
FR2683890A1 (fr) 1993-05-21
CA2082779C (fr) 2001-10-02
US5287873A (en) 1994-02-22

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Legal Events

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