JPH0524615B2 - - Google Patents

Info

Publication number
JPH0524615B2
JPH0524615B2 JP58088681A JP8868183A JPH0524615B2 JP H0524615 B2 JPH0524615 B2 JP H0524615B2 JP 58088681 A JP58088681 A JP 58088681A JP 8868183 A JP8868183 A JP 8868183A JP H0524615 B2 JPH0524615 B2 JP H0524615B2
Authority
JP
Japan
Prior art keywords
pixels
displayed
sample
irradiation
irradiation point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58088681A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59214151A (ja
Inventor
Masayuki Taira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP58088681A priority Critical patent/JPS59214151A/ja
Publication of JPS59214151A publication Critical patent/JPS59214151A/ja
Publication of JPH0524615B2 publication Critical patent/JPH0524615B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP58088681A 1983-05-20 1983-05-20 荷電粒子線装置等における二次元画像デ−タの表示方法 Granted JPS59214151A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58088681A JPS59214151A (ja) 1983-05-20 1983-05-20 荷電粒子線装置等における二次元画像デ−タの表示方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58088681A JPS59214151A (ja) 1983-05-20 1983-05-20 荷電粒子線装置等における二次元画像デ−タの表示方法

Publications (2)

Publication Number Publication Date
JPS59214151A JPS59214151A (ja) 1984-12-04
JPH0524615B2 true JPH0524615B2 (nl) 1993-04-08

Family

ID=13949568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58088681A Granted JPS59214151A (ja) 1983-05-20 1983-05-20 荷電粒子線装置等における二次元画像デ−タの表示方法

Country Status (1)

Country Link
JP (1) JPS59214151A (nl)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0638329B2 (ja) * 1986-12-29 1994-05-18 セイコー電子工業株式会社 集束イオンビーム走査方法
JP2007003535A (ja) * 2001-08-29 2007-01-11 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
IL156419A0 (en) * 2001-08-29 2004-01-04 Hitachi Ltd Sample dimension measuring method and scanning electron microscope
JP2006138864A (ja) * 2001-08-29 2006-06-01 Hitachi Ltd 試料寸法測定方法及び走査型電子顕微鏡
WO2003067652A1 (en) * 2002-02-04 2003-08-14 Applied Materials Israel, Ltd. A system and method for inspecting charged particle responsive resist
JP4748714B2 (ja) * 2005-10-28 2011-08-17 エスアイアイ・ナノテクノロジー株式会社 荷電粒子ビーム走査照射方法、荷電粒子ビーム装置、試料観察方法、及び、試料加工方法
EP2735866A1 (en) * 2012-11-27 2014-05-28 Fei Company Method of sampling a sample and displaying obtained information

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236410A (en) * 1975-09-18 1977-03-19 Nippon Telegr & Teleph Corp <Ntt> Facsimile communicion system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236410A (en) * 1975-09-18 1977-03-19 Nippon Telegr & Teleph Corp <Ntt> Facsimile communicion system

Also Published As

Publication number Publication date
JPS59214151A (ja) 1984-12-04

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