JPH0523261Y2 - - Google Patents

Info

Publication number
JPH0523261Y2
JPH0523261Y2 JP1986013805U JP1380586U JPH0523261Y2 JP H0523261 Y2 JPH0523261 Y2 JP H0523261Y2 JP 1986013805 U JP1986013805 U JP 1986013805U JP 1380586 U JP1380586 U JP 1380586U JP H0523261 Y2 JPH0523261 Y2 JP H0523261Y2
Authority
JP
Japan
Prior art keywords
film
irradiation
electron beam
irradiation chamber
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986013805U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62126279U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986013805U priority Critical patent/JPH0523261Y2/ja
Publication of JPS62126279U publication Critical patent/JPS62126279U/ja
Application granted granted Critical
Publication of JPH0523261Y2 publication Critical patent/JPH0523261Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Processes Of Treating Macromolecular Substances (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP1986013805U 1986-01-31 1986-01-31 Expired - Lifetime JPH0523261Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986013805U JPH0523261Y2 (enExample) 1986-01-31 1986-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986013805U JPH0523261Y2 (enExample) 1986-01-31 1986-01-31

Publications (2)

Publication Number Publication Date
JPS62126279U JPS62126279U (enExample) 1987-08-11
JPH0523261Y2 true JPH0523261Y2 (enExample) 1993-06-15

Family

ID=30803213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986013805U Expired - Lifetime JPH0523261Y2 (enExample) 1986-01-31 1986-01-31

Country Status (1)

Country Link
JP (1) JPH0523261Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024155000A (ja) * 2023-04-20 2024-10-31 ウシオ電機株式会社 光処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2726377B2 (de) * 1977-06-10 1980-10-30 Robert Bosch Gmbh, 7000 Stuttgart Kraftstoff-Zumessungseinrichtung für Brennkraftmaschinen

Also Published As

Publication number Publication date
JPS62126279U (enExample) 1987-08-11

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