JPH05226631A - Ｃｃｄ映像素子の製造方法 - Google Patents

Ｃｃｄ映像素子の製造方法

Info

Publication number
JPH05226631A
JPH05226631A JP4301546A JP30154692A JPH05226631A JP H05226631 A JPH05226631 A JP H05226631A JP 4301546 A JP4301546 A JP 4301546A JP 30154692 A JP30154692 A JP 30154692A JP H05226631 A JPH05226631 A JP H05226631A
Authority
JP
Japan
Prior art keywords
insulating film
film
substrate
impurity region
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4301546A
Other languages
English (en)
Japanese (ja)
Inventor
Uya Shinji
眞司 宇家
Dong K Son
ドン・ギュン・ゾン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SK Hynix Inc
Original Assignee
Goldstar Electron Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Goldstar Electron Co Ltd filed Critical Goldstar Electron Co Ltd
Publication of JPH05226631A publication Critical patent/JPH05226631A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/15—Charge-coupled device [CCD] image sensors
    • H10F39/153—Two-dimensional or three-dimensional array CCD image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D44/00—Charge transfer devices
    • H10D44/40—Charge-coupled devices [CCD]
    • H10D44/45—Charge-coupled devices [CCD] having field effect produced by insulated gate electrodes 
    • H10D44/462—Buried-channel CCD
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/15—Charge-coupled device [CCD] image sensors
    • H10F39/151—Geometry or disposition of pixel elements, address lines or gate electrodes
    • H10F39/1515—Optical shielding

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
JP4301546A 1991-10-15 1992-10-15 Ｃｃｄ映像素子の製造方法 Pending JPH05226631A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019910018117A KR940009648B1 (ko) 1991-10-15 1991-10-15 전하결합소자의 제조방법
KR18117/1991 1991-10-15

Publications (1)

Publication Number Publication Date
JPH05226631A true JPH05226631A (ja) 1993-09-03

Family

ID=19321264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4301546A Pending JPH05226631A (ja) 1991-10-15 1992-10-15 Ｃｃｄ映像素子の製造方法

Country Status (5)

Country Link
US (1) US5246875A (enExample)
JP (1) JPH05226631A (enExample)
KR (1) KR940009648B1 (enExample)
DE (1) DE4234499C2 (enExample)
TW (1) TW218054B (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2910394B2 (ja) * 1992-03-19 1999-06-23 日本電気株式会社 固体撮像素子およびその製造方法
US5341008A (en) * 1993-09-21 1994-08-23 Texas Instruments Incorporated Bulk charge modulated device photocell with lateral charge drain
US5384267A (en) * 1993-10-19 1995-01-24 Texas Instruments Incorporated Method of forming infrared detector by hydrogen plasma etching to form refractory metal interconnects
KR0136933B1 (ko) * 1994-05-21 1998-04-24 문정환 씨씨디(ccd) 영상소자 및 제조방법
KR0148734B1 (ko) * 1995-06-22 1998-08-01 문정환 시시디 촬상소자 제조방법
US7072650B2 (en) * 2000-11-13 2006-07-04 Meshnetworks, Inc. Ad hoc peer-to-peer mobile radio access system interfaced to the PSTN and cellular networks
JP2002190586A (ja) * 2000-12-22 2002-07-05 Mitsubishi Electric Corp 固体撮像装置およびその製造方法
JP2002314063A (ja) * 2001-02-06 2002-10-25 Mitsubishi Electric Corp Ｃｍｏｓイメージセンサ及びその製造方法
KR100780246B1 (ko) * 2006-09-26 2007-11-27 동부일렉트로닉스 주식회사 이미지 센서 제조방법

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1595253A (en) * 1977-01-24 1981-08-12 Hitachi Ltd Solid-state imaging devices
FR2533371B1 (fr) * 1982-09-21 1985-12-13 Thomson Csf Structure de grille pour circuit integre comportant des elements du type grille-isolant-semi-conducteur et procede de realisation d'un circuit integre utilisant une telle structure
DE3586452T2 (de) * 1984-10-18 1993-03-18 Matsushita Electronics Corp Festkoerperbildsensor und verfahren zu seiner herstellung.
US4906584A (en) * 1985-02-25 1990-03-06 Tektronix, Inc. Fast channel single phase buried channel CCD
JPS61216472A (ja) * 1985-03-22 1986-09-26 Toshiba Corp 電荷転送装置の製造方法
JPS62124771A (ja) * 1985-11-25 1987-06-06 Sharp Corp 固体撮像装置
JPH0316232A (ja) * 1989-06-14 1991-01-24 Matsushita Electron Corp 電荷結合素子の製造方法
US5135882A (en) * 1989-07-31 1992-08-04 Micron Technology, Inc. Technique for forming high-value inter-nodal coupling resistance for rad-hard applications in a double-poly, salicide process using local interconnect

Also Published As

Publication number Publication date
DE4234499A1 (de) 1993-04-22
DE4234499C2 (de) 1996-07-11
KR930009139A (ko) 1993-05-22
KR940009648B1 (ko) 1994-10-15
TW218054B (enExample) 1993-12-21
US5246875A (en) 1993-09-21

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