JPH0521421B2 - - Google Patents

Info

Publication number
JPH0521421B2
JPH0521421B2 JP60265331A JP26533185A JPH0521421B2 JP H0521421 B2 JPH0521421 B2 JP H0521421B2 JP 60265331 A JP60265331 A JP 60265331A JP 26533185 A JP26533185 A JP 26533185A JP H0521421 B2 JPH0521421 B2 JP H0521421B2
Authority
JP
Japan
Prior art keywords
light
inspected
optical system
defect
photoelectric conversion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60265331A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62124448A (ja
Inventor
Kei Nara
Motoo Horai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP26533185A priority Critical patent/JPS62124448A/ja
Publication of JPS62124448A publication Critical patent/JPS62124448A/ja
Publication of JPH0521421B2 publication Critical patent/JPH0521421B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP26533185A 1985-11-26 1985-11-26 表面検査装置 Granted JPS62124448A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26533185A JPS62124448A (ja) 1985-11-26 1985-11-26 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26533185A JPS62124448A (ja) 1985-11-26 1985-11-26 表面検査装置

Publications (2)

Publication Number Publication Date
JPS62124448A JPS62124448A (ja) 1987-06-05
JPH0521421B2 true JPH0521421B2 (enExample) 1993-03-24

Family

ID=17415702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26533185A Granted JPS62124448A (ja) 1985-11-26 1985-11-26 表面検査装置

Country Status (1)

Country Link
JP (1) JPS62124448A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07220930A (ja) * 1994-02-07 1995-08-18 Mosutetsuku:Kk リードフレーム枠体

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297542A (ja) * 1988-05-25 1989-11-30 Csk Corp 欠陥検査装置
WO2007132925A1 (ja) * 2006-05-15 2007-11-22 Nikon Corporation 表面検査装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5382492A (en) * 1976-12-28 1978-07-20 Fujitsu Ltd Surface inspecting method
JPS56118646A (en) * 1980-02-25 1981-09-17 Hitachi Ltd Flaw inspecting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07220930A (ja) * 1994-02-07 1995-08-18 Mosutetsuku:Kk リードフレーム枠体

Also Published As

Publication number Publication date
JPS62124448A (ja) 1987-06-05

Similar Documents

Publication Publication Date Title
US5875029A (en) Apparatus and method for surface inspection by specular interferometric and diffuse light detection
CN209028014U (zh) 检测系统
TWM592964U (zh) 檢測系統
JPS6367549A (ja) 光ディスク用レジスト原盤の欠陥検査及び膜厚測定装置
US5719840A (en) Optical sensor with an elliptical illumination spot
JP2009133778A (ja) 検査装置及び検査方法
CN101165477A (zh) 检测玻璃盘的圆周表面缺陷的光学系统及装置
JPH0521421B2 (enExample)
JPH0758268B2 (ja) 空間フィルタと面構造をモニタするシステム
JP3338080B2 (ja) ディスク外周部検査装置
JPH0833354B2 (ja) 欠陥検査装置
JPS5973710A (ja) 透明円板の表面欠陥検査装置
JP2503919B2 (ja) 異物検査装置
JP2009267306A (ja) 検査装置
JPH0495861A (ja) 透明体円形ワークの欠陥検出装置
JP3277400B2 (ja) 光ディスク欠陥検査装置
JPH03186739A (ja) 磁気ディスク基板の外周端部損傷の検出回路
JP2923808B2 (ja) 面板表面の凹凸検出方法および検査装置
JP2683039B2 (ja) 光ディスク検査装置
JPS62267650A (ja) 面板欠陥検出方法およびその検出器
JPH05149887A (ja) 光デイスク用欠陥検出方法及びその装置
JPS63153454A (ja) 光デイスク透明円板の欠陥検査装置
JPH0776756B2 (ja) ディスク検査装置
JPH0614014B2 (ja) 磁気ディスク用のサブストレート面板の表面欠陥検出装置
JPH01245138A (ja) ガラスディスク検査装置における散乱光の受光方式および受光器

Legal Events

Date Code Title Description
S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

EXPY Cancellation because of completion of term