JPS62124448A - 表面検査装置 - Google Patents

表面検査装置

Info

Publication number
JPS62124448A
JPS62124448A JP26533185A JP26533185A JPS62124448A JP S62124448 A JPS62124448 A JP S62124448A JP 26533185 A JP26533185 A JP 26533185A JP 26533185 A JP26533185 A JP 26533185A JP S62124448 A JPS62124448 A JP S62124448A
Authority
JP
Japan
Prior art keywords
defect
inspected
optical system
light
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP26533185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521421B2 (enExample
Inventor
Kei Nara
圭 奈良
Izuo Hourai
泉雄 蓬莱
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP26533185A priority Critical patent/JPS62124448A/ja
Publication of JPS62124448A publication Critical patent/JPS62124448A/ja
Publication of JPH0521421B2 publication Critical patent/JPH0521421B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP26533185A 1985-11-26 1985-11-26 表面検査装置 Granted JPS62124448A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26533185A JPS62124448A (ja) 1985-11-26 1985-11-26 表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26533185A JPS62124448A (ja) 1985-11-26 1985-11-26 表面検査装置

Publications (2)

Publication Number Publication Date
JPS62124448A true JPS62124448A (ja) 1987-06-05
JPH0521421B2 JPH0521421B2 (enExample) 1993-03-24

Family

ID=17415702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26533185A Granted JPS62124448A (ja) 1985-11-26 1985-11-26 表面検査装置

Country Status (1)

Country Link
JP (1) JPS62124448A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297542A (ja) * 1988-05-25 1989-11-30 Csk Corp 欠陥検査装置
JPWO2007132925A1 (ja) * 2006-05-15 2009-09-24 株式会社ニコン 表面検査装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07220930A (ja) * 1994-02-07 1995-08-18 Mosutetsuku:Kk リードフレーム枠体

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5382492A (en) * 1976-12-28 1978-07-20 Fujitsu Ltd Surface inspecting method
JPS56118646A (en) * 1980-02-25 1981-09-17 Hitachi Ltd Flaw inspecting apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5382492A (en) * 1976-12-28 1978-07-20 Fujitsu Ltd Surface inspecting method
JPS56118646A (en) * 1980-02-25 1981-09-17 Hitachi Ltd Flaw inspecting apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01297542A (ja) * 1988-05-25 1989-11-30 Csk Corp 欠陥検査装置
WO1989011645A1 (fr) * 1988-05-25 1989-11-30 Kabushiki Kaisha Csk Appareil d'inspection de defauts
US5067812A (en) * 1988-05-25 1991-11-26 Kabushiki Kaisha Csk Systems for inspecting defects in an optical recording medium
JPWO2007132925A1 (ja) * 2006-05-15 2009-09-24 株式会社ニコン 表面検査装置

Also Published As

Publication number Publication date
JPH0521421B2 (enExample) 1993-03-24

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