JPH0520333B2 - - Google Patents
Info
- Publication number
- JPH0520333B2 JPH0520333B2 JP22625886A JP22625886A JPH0520333B2 JP H0520333 B2 JPH0520333 B2 JP H0520333B2 JP 22625886 A JP22625886 A JP 22625886A JP 22625886 A JP22625886 A JP 22625886A JP H0520333 B2 JPH0520333 B2 JP H0520333B2
- Authority
- JP
- Japan
- Prior art keywords
- arm
- carrier
- take
- wafer
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 7
- 235000012431 wafers Nutrition 0.000 description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61226258A JPS6382248A (ja) | 1986-09-26 | 1986-09-26 | 薄板状物品の搬出または搬入装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61226258A JPS6382248A (ja) | 1986-09-26 | 1986-09-26 | 薄板状物品の搬出または搬入装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6382248A JPS6382248A (ja) | 1988-04-13 |
| JPH0520333B2 true JPH0520333B2 (zh) | 1993-03-19 |
Family
ID=16842378
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61226258A Granted JPS6382248A (ja) | 1986-09-26 | 1986-09-26 | 薄板状物品の搬出または搬入装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6382248A (zh) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01297836A (ja) * | 1988-05-25 | 1989-11-30 | Nec Kyushu Ltd | ウェーハ受け渡し装置 |
| JP3075561B2 (ja) * | 1989-01-27 | 2000-08-14 | 日立電子エンジニアリング株式会社 | カセット内のウェハ取出し制御方式 |
| JP2564708Y2 (ja) * | 1991-09-20 | 1998-03-09 | 東京応化工業株式会社 | ウェハーの移載装置 |
| JPH06169003A (ja) * | 1992-11-27 | 1994-06-14 | Dainippon Screen Mfg Co Ltd | 基板搬送装置 |
| DE4310149C2 (de) * | 1993-03-29 | 1996-05-02 | Jenoptik Jena Gmbh | Einrichtung zur Handhabung von scheibenförmigen Objekten in einer Handhabungsebene eines lokalen Reinraumes |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6083245U (ja) * | 1983-11-15 | 1985-06-08 | 大日本スクリーン製造株式会社 | カセツト式薄片搬出入用薄片検知装置 |
| JPS60180206U (ja) * | 1984-05-11 | 1985-11-29 | 株式会社日立製作所 | ウエハ搬送装置 |
-
1986
- 1986-09-26 JP JP61226258A patent/JPS6382248A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6382248A (ja) | 1988-04-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |