JPH051975B2 - - Google Patents

Info

Publication number
JPH051975B2
JPH051975B2 JP60273062A JP27306285A JPH051975B2 JP H051975 B2 JPH051975 B2 JP H051975B2 JP 60273062 A JP60273062 A JP 60273062A JP 27306285 A JP27306285 A JP 27306285A JP H051975 B2 JPH051975 B2 JP H051975B2
Authority
JP
Japan
Prior art keywords
cassette
etched
etching
standard
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60273062A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62132322A (ja
Inventor
Yoshikazu Maegaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Engineering Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Engineering Works Co Ltd filed Critical Shibaura Engineering Works Co Ltd
Priority to JP27306285A priority Critical patent/JPS62132322A/ja
Publication of JPS62132322A publication Critical patent/JPS62132322A/ja
Publication of JPH051975B2 publication Critical patent/JPH051975B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP27306285A 1985-12-04 1985-12-04 エッチング装置 Granted JPS62132322A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27306285A JPS62132322A (ja) 1985-12-04 1985-12-04 エッチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27306285A JPS62132322A (ja) 1985-12-04 1985-12-04 エッチング装置

Publications (2)

Publication Number Publication Date
JPS62132322A JPS62132322A (ja) 1987-06-15
JPH051975B2 true JPH051975B2 (enrdf_load_stackoverflow) 1993-01-11

Family

ID=17522617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27306285A Granted JPS62132322A (ja) 1985-12-04 1985-12-04 エッチング装置

Country Status (1)

Country Link
JP (1) JPS62132322A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024094733A1 (en) 2022-11-04 2024-05-10 Basf Se Polypeptides having protease activity for use in detergent compositions

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8900544A (nl) * 1989-03-06 1990-10-01 Asm Europ Behandelingsstelsel, behandelingsvat en werkwijze voor het behandelen van een substraat.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5759345A (en) * 1980-09-26 1982-04-09 Mitsubishi Electric Corp Feeder for semiconductor substrate
JPS5831532A (ja) * 1981-08-18 1983-02-24 Nec Corp プラズマ処理装置
JPS60196946A (ja) * 1984-03-21 1985-10-05 Hitachi Ltd プラズマ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024094733A1 (en) 2022-11-04 2024-05-10 Basf Se Polypeptides having protease activity for use in detergent compositions

Also Published As

Publication number Publication date
JPS62132322A (ja) 1987-06-15

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Legal Events

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