JPH0519520B2 - - Google Patents

Info

Publication number
JPH0519520B2
JPH0519520B2 JP63148903A JP14890388A JPH0519520B2 JP H0519520 B2 JPH0519520 B2 JP H0519520B2 JP 63148903 A JP63148903 A JP 63148903A JP 14890388 A JP14890388 A JP 14890388A JP H0519520 B2 JPH0519520 B2 JP H0519520B2
Authority
JP
Japan
Prior art keywords
film
substrate
thin film
diamond thin
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63148903A
Other languages
English (en)
Japanese (ja)
Other versions
JPH01317197A (ja
Inventor
Kenji Yamamoto
Yoshihisa Oowada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP14890388A priority Critical patent/JPH01317197A/ja
Publication of JPH01317197A publication Critical patent/JPH01317197A/ja
Publication of JPH0519520B2 publication Critical patent/JPH0519520B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP14890388A 1988-06-16 1988-06-16 ダイヤモンド薄膜基板およびその製法 Granted JPH01317197A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14890388A JPH01317197A (ja) 1988-06-16 1988-06-16 ダイヤモンド薄膜基板およびその製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14890388A JPH01317197A (ja) 1988-06-16 1988-06-16 ダイヤモンド薄膜基板およびその製法

Publications (2)

Publication Number Publication Date
JPH01317197A JPH01317197A (ja) 1989-12-21
JPH0519520B2 true JPH0519520B2 (enrdf_load_stackoverflow) 1993-03-16

Family

ID=15463247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14890388A Granted JPH01317197A (ja) 1988-06-16 1988-06-16 ダイヤモンド薄膜基板およびその製法

Country Status (1)

Country Link
JP (1) JPH01317197A (enrdf_load_stackoverflow)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263789A (ja) * 1989-03-31 1990-10-26 Kanagawa Pref Gov ダイヤモンド単結晶膜を有するシリコン基板とその製造方法
JP2775903B2 (ja) * 1989-10-04 1998-07-16 住友電気工業株式会社 ダイヤモンド半導体素子
US5260106A (en) * 1990-08-03 1993-11-09 Fujitsu Limited Method for forming diamond films by plasma jet CVD
JP2617374B2 (ja) * 1990-09-25 1997-06-04 株式会社半導体エネルギー研究所 ダイヤモンド薄膜とその作製方法
US5626963A (en) * 1993-07-07 1997-05-06 Sanyo Electric Co., Ltd. Hard-carbon-film-coated substrate and apparatus for forming the same
US5691010A (en) * 1993-10-19 1997-11-25 Sanyo Electric Co., Ltd. Arc discharge plasma CVD method for forming diamond-like carbon films
DE4415601C2 (de) * 1994-05-04 1997-12-18 Daimler Benz Ag Komposit-Struktur für elektronische Bauteile und Verfahren zu deren Herstellung
US6066399A (en) * 1997-03-19 2000-05-23 Sanyo Electric Co., Ltd. Hard carbon thin film and method of forming the same
US6335863B1 (en) * 1998-01-16 2002-01-01 Sumitomo Electric Industries, Ltd. Package for semiconductors, and semiconductor module that employs the package
JP3631366B2 (ja) * 1998-03-11 2005-03-23 株式会社神戸製鋼所 単結晶ダイヤモンド合成用基板
JP4560964B2 (ja) * 2000-02-25 2010-10-13 住友電気工業株式会社 非晶質炭素被覆部材
FR2856078B1 (fr) * 2003-06-16 2006-11-17 Commissariat Energie Atomique Revetement pour une piece mecanique comprenant au moins du carbone amorphe hydrogene et procede de depot d'un tel revetement.
JP2005054264A (ja) * 2003-08-07 2005-03-03 Ebara Corp ダイアモンド電極の成膜方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325662A (ja) * 1986-07-18 1988-02-03 Fuji Electric Co Ltd 電子写真感光体
DE3772671D1 (de) * 1986-08-11 1991-10-10 Sumitomo Electric Industries Aluminiumoxyd, beschichtet mit diamant.
JP2532222B2 (ja) * 1986-12-01 1996-09-11 小糸工業株式会社 情報表示装置

Also Published As

Publication number Publication date
JPH01317197A (ja) 1989-12-21

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