JPH0519303B2 - - Google Patents

Info

Publication number
JPH0519303B2
JPH0519303B2 JP59033458A JP3345884A JPH0519303B2 JP H0519303 B2 JPH0519303 B2 JP H0519303B2 JP 59033458 A JP59033458 A JP 59033458A JP 3345884 A JP3345884 A JP 3345884A JP H0519303 B2 JPH0519303 B2 JP H0519303B2
Authority
JP
Japan
Prior art keywords
wiring
wirings
layer
layer wiring
lower layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59033458A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60178641A (ja
Inventor
Tsutomu Akashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP3345884A priority Critical patent/JPS60178641A/ja
Publication of JPS60178641A publication Critical patent/JPS60178641A/ja
Publication of JPH0519303B2 publication Critical patent/JPH0519303B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP3345884A 1984-02-24 1984-02-24 半導体装置 Granted JPS60178641A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3345884A JPS60178641A (ja) 1984-02-24 1984-02-24 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3345884A JPS60178641A (ja) 1984-02-24 1984-02-24 半導体装置

Publications (2)

Publication Number Publication Date
JPS60178641A JPS60178641A (ja) 1985-09-12
JPH0519303B2 true JPH0519303B2 (enrdf_load_stackoverflow) 1993-03-16

Family

ID=12387094

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3345884A Granted JPS60178641A (ja) 1984-02-24 1984-02-24 半導体装置

Country Status (1)

Country Link
JP (1) JPS60178641A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04267586A (ja) * 1991-02-22 1992-09-24 Nec Corp 同軸配線パターンおよびその形成方法
JP2797929B2 (ja) * 1993-10-22 1998-09-17 日本電気株式会社 半導体装置
US5665644A (en) * 1995-11-03 1997-09-09 Micron Technology, Inc. Semiconductor processing method of forming electrically conductive interconnect lines and integrated circuitry
US6091150A (en) * 1996-09-03 2000-07-18 Micron Technology, Inc. Integrated circuitry comprising electrically insulative material over interconnect line tops, sidewalls and bottoms

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138987A (ja) * 1974-09-30 1976-03-31 Hitachi Ltd Haisensonokeiseihoho

Also Published As

Publication number Publication date
JPS60178641A (ja) 1985-09-12

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