JPH0518758Y2 - - Google Patents

Info

Publication number
JPH0518758Y2
JPH0518758Y2 JP1986135959U JP13595986U JPH0518758Y2 JP H0518758 Y2 JPH0518758 Y2 JP H0518758Y2 JP 1986135959 U JP1986135959 U JP 1986135959U JP 13595986 U JP13595986 U JP 13595986U JP H0518758 Y2 JPH0518758 Y2 JP H0518758Y2
Authority
JP
Japan
Prior art keywords
wafer
mask
semiconductor wafer
sides
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986135959U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6341156U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986135959U priority Critical patent/JPH0518758Y2/ja
Publication of JPS6341156U publication Critical patent/JPS6341156U/ja
Application granted granted Critical
Publication of JPH0518758Y2 publication Critical patent/JPH0518758Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986135959U 1986-09-04 1986-09-04 Expired - Lifetime JPH0518758Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986135959U JPH0518758Y2 (cs) 1986-09-04 1986-09-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986135959U JPH0518758Y2 (cs) 1986-09-04 1986-09-04

Publications (2)

Publication Number Publication Date
JPS6341156U JPS6341156U (cs) 1988-03-17
JPH0518758Y2 true JPH0518758Y2 (cs) 1993-05-18

Family

ID=31038632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986135959U Expired - Lifetime JPH0518758Y2 (cs) 1986-09-04 1986-09-04

Country Status (1)

Country Link
JP (1) JPH0518758Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917441U (ja) * 1982-07-23 1984-02-02 日東電工株式会社 フオトマスク

Also Published As

Publication number Publication date
JPS6341156U (cs) 1988-03-17

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