JPH0515486B2 - - Google Patents

Info

Publication number
JPH0515486B2
JPH0515486B2 JP62139782A JP13978287A JPH0515486B2 JP H0515486 B2 JPH0515486 B2 JP H0515486B2 JP 62139782 A JP62139782 A JP 62139782A JP 13978287 A JP13978287 A JP 13978287A JP H0515486 B2 JPH0515486 B2 JP H0515486B2
Authority
JP
Japan
Prior art keywords
water
raw water
ultrapure water
vapor
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP62139782A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63305917A (ja
Inventor
Hideaki Kurokawa
Akira Yamada
Yasuo Koseki
Harumi Matsuzaki
Katsuya Ebara
Sankichi Takahashi
Hiroaki Yoda
Nobuatsu Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62139782A priority Critical patent/JPS63305917A/ja
Priority to DE88104672T priority patent/DE3884435T2/de
Priority to EP88104672A priority patent/EP0284052B1/en
Priority to US07/172,583 priority patent/US4879041A/en
Priority to KR1019880003177A priority patent/KR960003543B1/ko
Publication of JPS63305917A publication Critical patent/JPS63305917A/ja
Publication of JPH0515486B2 publication Critical patent/JPH0515486B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
  • Heat Treatment Of Water, Waste Water Or Sewage (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP62139782A 1987-03-25 1987-06-05 超純水製造方法及びその製造装置 Granted JPS63305917A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62139782A JPS63305917A (ja) 1987-06-05 1987-06-05 超純水製造方法及びその製造装置
DE88104672T DE3884435T2 (de) 1987-03-25 1988-03-23 Verfahren zur Erzeugung hochreinen Wassers und Verfahren zur Verwendung dieses Wassers.
EP88104672A EP0284052B1 (en) 1987-03-25 1988-03-23 Process for producing ultra-pure water and process for using said ultra-pure water
US07/172,583 US4879041A (en) 1987-03-25 1988-03-24 Process for producing ultra-pure water and process for using said ultra-pure water
KR1019880003177A KR960003543B1 (ko) 1987-03-25 1988-03-24 초순수 제조방법 및 초순수 사용방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62139782A JPS63305917A (ja) 1987-06-05 1987-06-05 超純水製造方法及びその製造装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4211238A Division JPH0757301B2 (ja) 1992-08-07 1992-08-07 半導体集積回路の洗浄方法及びその洗浄装置

Publications (2)

Publication Number Publication Date
JPS63305917A JPS63305917A (ja) 1988-12-13
JPH0515486B2 true JPH0515486B2 (enrdf_load_stackoverflow) 1993-03-01

Family

ID=15253296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62139782A Granted JPS63305917A (ja) 1987-03-25 1987-06-05 超純水製造方法及びその製造装置

Country Status (1)

Country Link
JP (1) JPS63305917A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0380982A (ja) * 1989-08-25 1991-04-05 Hitachi Zosen Corp 超純水製造用多重効用蒸留器における不純物除去装置
JPH05136114A (ja) * 1991-11-08 1993-06-01 Tadahiro Omi 超純水供給装置及び基体洗浄方法並びに超純水製造装置及び超純水製造方法
JP2652301B2 (ja) * 1992-05-28 1997-09-10 株式会社荏原製作所 洗浄水製造装置
US7678235B2 (en) * 2005-10-19 2010-03-16 Sylvan Source, Inc. Water purification system
US7837877B2 (en) 2006-06-09 2010-11-23 Air Products And Chemicals, Inc. Process for separating components of a multi-component feed stream
JP5819987B2 (ja) * 2011-12-20 2015-11-24 オルガノ株式会社 液体管理システムおよび液体管理方法
JP7402392B2 (ja) * 2022-04-28 2023-12-21 株式会社Sosui 水、その製造方法および製造システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5855921U (ja) * 1981-10-12 1983-04-15 日立化成工業株式会社 発泡成形金型
FI852479A7 (fi) * 1985-06-20 1986-12-21 Oy Santasalo Sohlberg Ab Menetelmä ja laite haihtuvien aineiden poistamiseksi vedestä vettä tislattaessa tai höyrystettäessä.

Also Published As

Publication number Publication date
JPS63305917A (ja) 1988-12-13

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