JPH0515051B2 - - Google Patents

Info

Publication number
JPH0515051B2
JPH0515051B2 JP61031190A JP3119086A JPH0515051B2 JP H0515051 B2 JPH0515051 B2 JP H0515051B2 JP 61031190 A JP61031190 A JP 61031190A JP 3119086 A JP3119086 A JP 3119086A JP H0515051 B2 JPH0515051 B2 JP H0515051B2
Authority
JP
Japan
Prior art keywords
silicon substrate
alignment mark
substrate
alignment marks
back surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61031190A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62188319A (ja
Inventor
Kazumi Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP61031190A priority Critical patent/JPS62188319A/ja
Publication of JPS62188319A publication Critical patent/JPS62188319A/ja
Publication of JPH0515051B2 publication Critical patent/JPH0515051B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP61031190A 1986-02-14 1986-02-14 半導体装置の製造方法 Granted JPS62188319A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61031190A JPS62188319A (ja) 1986-02-14 1986-02-14 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61031190A JPS62188319A (ja) 1986-02-14 1986-02-14 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62188319A JPS62188319A (ja) 1987-08-17
JPH0515051B2 true JPH0515051B2 (OSRAM) 1993-02-26

Family

ID=12324510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61031190A Granted JPS62188319A (ja) 1986-02-14 1986-02-14 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62188319A (OSRAM)

Also Published As

Publication number Publication date
JPS62188319A (ja) 1987-08-17

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