JPH0513379B2 - - Google Patents
Info
- Publication number
- JPH0513379B2 JPH0513379B2 JP60269518A JP26951885A JPH0513379B2 JP H0513379 B2 JPH0513379 B2 JP H0513379B2 JP 60269518 A JP60269518 A JP 60269518A JP 26951885 A JP26951885 A JP 26951885A JP H0513379 B2 JPH0513379 B2 JP H0513379B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- boat
- cassette
- support
- vertical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 346
- 238000012546 transfer Methods 0.000 claims description 110
- 239000000725 suspension Substances 0.000 claims description 55
- 230000003028 elevating effect Effects 0.000 claims description 20
- 230000002265 prevention Effects 0.000 claims description 14
- 238000012545 processing Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 43
- 230000007246 mechanism Effects 0.000 description 18
- 230000009467 reduction Effects 0.000 description 7
- 230000004308 accommodation Effects 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26951885A JPS62130534A (ja) | 1985-12-02 | 1985-12-02 | 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26951885A JPS62130534A (ja) | 1985-12-02 | 1985-12-02 | 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62130534A JPS62130534A (ja) | 1987-06-12 |
| JPH0513379B2 true JPH0513379B2 (US20030204162A1-20031030-M00001.png) | 1993-02-22 |
Family
ID=17473513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26951885A Granted JPS62130534A (ja) | 1985-12-02 | 1985-12-02 | 縦型ウエ−ハ処理装置のためのウエ−ハ搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130534A (US20030204162A1-20031030-M00001.png) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2742572B2 (ja) * | 1987-10-29 | 1998-04-22 | 東芝セラミックス株式会社 | 半導体ウェーハの縦型熱処理装置 |
| JP2651859B2 (ja) * | 1987-12-12 | 1997-09-10 | 東京エレクトロン株式会社 | 半導体ウエハー処理装置 |
| JP2640750B2 (ja) * | 1988-03-10 | 1997-08-13 | 東京エレクトロン株式会社 | 縦型熱処理装置用移送装置 |
| JPH07105357B2 (ja) * | 1989-01-28 | 1995-11-13 | 国際電気株式会社 | 縦型ｃｖｄ拡散装置に於けるウェーハ移載方法及び装置 |
| JPH03125453A (ja) * | 1989-10-09 | 1991-05-28 | Toshiba Corp | 半導体ウエハ移送装置 |
| US6579052B1 (en) * | 1997-07-11 | 2003-06-17 | Asyst Technologies, Inc. | SMIF pod storage, delivery and retrieval system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56165317A (en) * | 1980-05-26 | 1981-12-18 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS59100549A (ja) * | 1982-11-30 | 1984-06-09 | Nichiden Mach Ltd | ウエハ−移し替え装置 |
-
1985
- 1985-12-02 JP JP26951885A patent/JPS62130534A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56165317A (en) * | 1980-05-26 | 1981-12-18 | Fujitsu Ltd | Manufacture of semiconductor device |
| JPS59100549A (ja) * | 1982-11-30 | 1984-06-09 | Nichiden Mach Ltd | ウエハ−移し替え装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62130534A (ja) | 1987-06-12 |
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