JPH051075Y2 - - Google Patents

Info

Publication number
JPH051075Y2
JPH051075Y2 JP1987055147U JP5514787U JPH051075Y2 JP H051075 Y2 JPH051075 Y2 JP H051075Y2 JP 1987055147 U JP1987055147 U JP 1987055147U JP 5514787 U JP5514787 U JP 5514787U JP H051075 Y2 JPH051075 Y2 JP H051075Y2
Authority
JP
Japan
Prior art keywords
liquid
wafer
carrier
stage
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987055147U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63162528U (US20100268047A1-20101021-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987055147U priority Critical patent/JPH051075Y2/ja
Publication of JPS63162528U publication Critical patent/JPS63162528U/ja
Application granted granted Critical
Publication of JPH051075Y2 publication Critical patent/JPH051075Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP1987055147U 1987-04-10 1987-04-10 Expired - Lifetime JPH051075Y2 (US20100268047A1-20101021-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987055147U JPH051075Y2 (US20100268047A1-20101021-C00003.png) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987055147U JPH051075Y2 (US20100268047A1-20101021-C00003.png) 1987-04-10 1987-04-10

Publications (2)

Publication Number Publication Date
JPS63162528U JPS63162528U (US20100268047A1-20101021-C00003.png) 1988-10-24
JPH051075Y2 true JPH051075Y2 (US20100268047A1-20101021-C00003.png) 1993-01-12

Family

ID=30882788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987055147U Expired - Lifetime JPH051075Y2 (US20100268047A1-20101021-C00003.png) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPH051075Y2 (US20100268047A1-20101021-C00003.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3897114B2 (ja) * 2003-06-10 2007-03-22 東京応化工業株式会社 基板の現像装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887832A (ja) * 1981-11-20 1983-05-25 Toshiba Corp 半導体処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887832A (ja) * 1981-11-20 1983-05-25 Toshiba Corp 半導体処理装置

Also Published As

Publication number Publication date
JPS63162528U (US20100268047A1-20101021-C00003.png) 1988-10-24

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