JPH051075Y2 - - Google Patents
Info
- Publication number
- JPH051075Y2 JPH051075Y2 JP1987055147U JP5514787U JPH051075Y2 JP H051075 Y2 JPH051075 Y2 JP H051075Y2 JP 1987055147 U JP1987055147 U JP 1987055147U JP 5514787 U JP5514787 U JP 5514787U JP H051075 Y2 JPH051075 Y2 JP H051075Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- wafer
- carrier
- stage
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 66
- 235000012431 wafers Nutrition 0.000 description 42
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987055147U JPH051075Y2 (US20100268047A1-20101021-C00003.png) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987055147U JPH051075Y2 (US20100268047A1-20101021-C00003.png) | 1987-04-10 | 1987-04-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63162528U JPS63162528U (US20100268047A1-20101021-C00003.png) | 1988-10-24 |
JPH051075Y2 true JPH051075Y2 (US20100268047A1-20101021-C00003.png) | 1993-01-12 |
Family
ID=30882788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987055147U Expired - Lifetime JPH051075Y2 (US20100268047A1-20101021-C00003.png) | 1987-04-10 | 1987-04-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH051075Y2 (US20100268047A1-20101021-C00003.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3897114B2 (ja) * | 2003-06-10 | 2007-03-22 | 東京応化工業株式会社 | 基板の現像装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5887832A (ja) * | 1981-11-20 | 1983-05-25 | Toshiba Corp | 半導体処理装置 |
-
1987
- 1987-04-10 JP JP1987055147U patent/JPH051075Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5887832A (ja) * | 1981-11-20 | 1983-05-25 | Toshiba Corp | 半導体処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS63162528U (US20100268047A1-20101021-C00003.png) | 1988-10-24 |
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