JPH051074Y2 - - Google Patents

Info

Publication number
JPH051074Y2
JPH051074Y2 JP1984089932U JP8993284U JPH051074Y2 JP H051074 Y2 JPH051074 Y2 JP H051074Y2 JP 1984089932 U JP1984089932 U JP 1984089932U JP 8993284 U JP8993284 U JP 8993284U JP H051074 Y2 JPH051074 Y2 JP H051074Y2
Authority
JP
Japan
Prior art keywords
rotor
support part
rod
main shaft
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1984089932U
Other languages
English (en)
Japanese (ja)
Other versions
JPS617028U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8993284U priority Critical patent/JPS617028U/ja
Publication of JPS617028U publication Critical patent/JPS617028U/ja
Application granted granted Critical
Publication of JPH051074Y2 publication Critical patent/JPH051074Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
JP8993284U 1984-06-15 1984-06-15 半導体材料の水切乾燥装置 Granted JPS617028U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8993284U JPS617028U (ja) 1984-06-15 1984-06-15 半導体材料の水切乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8993284U JPS617028U (ja) 1984-06-15 1984-06-15 半導体材料の水切乾燥装置

Publications (2)

Publication Number Publication Date
JPS617028U JPS617028U (ja) 1986-01-16
JPH051074Y2 true JPH051074Y2 (pm) 1993-01-12

Family

ID=30644477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8993284U Granted JPS617028U (ja) 1984-06-15 1984-06-15 半導体材料の水切乾燥装置

Country Status (1)

Country Link
JP (1) JPS617028U (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2530285Y2 (ja) * 1989-04-07 1997-03-26 株式会社 メディック ウエハーの水切乾燥装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53138278A (en) * 1977-05-10 1978-12-02 Toshiba Corp Drier for wafer
JPS55127163A (en) * 1979-03-24 1980-10-01 Mitsubishi Electric Corp Automatic centrifugal dehydrating apparatus
JPS55154336A (en) * 1979-05-22 1980-12-01 Nippon Telegr & Teleph Corp <Ntt> Manufacture of optical fiber raw material

Also Published As

Publication number Publication date
JPS617028U (ja) 1986-01-16

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