JPS53138278A - Drier for wafer - Google Patents

Drier for wafer

Info

Publication number
JPS53138278A
JPS53138278A JP5335777A JP5335777A JPS53138278A JP S53138278 A JPS53138278 A JP S53138278A JP 5335777 A JP5335777 A JP 5335777A JP 5335777 A JP5335777 A JP 5335777A JP S53138278 A JPS53138278 A JP S53138278A
Authority
JP
Japan
Prior art keywords
drier
wafer
substrate
holder
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5335777A
Other languages
Japanese (ja)
Inventor
Masakazu Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5335777A priority Critical patent/JPS53138278A/en
Publication of JPS53138278A publication Critical patent/JPS53138278A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: To dry automatically one sheet of substrate after processed, by supporting a holder for a supplied substrate slidably to the fulcrum of a support and by rotating the support after fixing the substrate to the holder.
COPYRIGHT: (C)1978,JPO&Japio
JP5335777A 1977-05-10 1977-05-10 Drier for wafer Pending JPS53138278A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5335777A JPS53138278A (en) 1977-05-10 1977-05-10 Drier for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5335777A JPS53138278A (en) 1977-05-10 1977-05-10 Drier for wafer

Publications (1)

Publication Number Publication Date
JPS53138278A true JPS53138278A (en) 1978-12-02

Family

ID=12940536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5335777A Pending JPS53138278A (en) 1977-05-10 1977-05-10 Drier for wafer

Country Status (1)

Country Link
JP (1) JPS53138278A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586116A (en) * 1978-12-25 1980-06-28 Hitachi Ltd Drier
JPS56118347A (en) * 1980-02-22 1981-09-17 Hitachi Ltd Drying device
JPS617028U (en) * 1984-06-15 1986-01-16 黒谷 巌 Semiconductor material draining and drying equipment
JPS6120049U (en) * 1984-07-11 1986-02-05 関西日本電気株式会社 Rotary dryer for diced wafers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586116A (en) * 1978-12-25 1980-06-28 Hitachi Ltd Drier
JPS56118347A (en) * 1980-02-22 1981-09-17 Hitachi Ltd Drying device
JPS617028U (en) * 1984-06-15 1986-01-16 黒谷 巌 Semiconductor material draining and drying equipment
JPH051074Y2 (en) * 1984-06-15 1993-01-12
JPS6120049U (en) * 1984-07-11 1986-02-05 関西日本電気株式会社 Rotary dryer for diced wafers

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