JPS53138278A - Drier for wafer - Google Patents
Drier for waferInfo
- Publication number
- JPS53138278A JPS53138278A JP5335777A JP5335777A JPS53138278A JP S53138278 A JPS53138278 A JP S53138278A JP 5335777 A JP5335777 A JP 5335777A JP 5335777 A JP5335777 A JP 5335777A JP S53138278 A JPS53138278 A JP S53138278A
- Authority
- JP
- Japan
- Prior art keywords
- drier
- wafer
- substrate
- holder
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE: To dry automatically one sheet of substrate after processed, by supporting a holder for a supplied substrate slidably to the fulcrum of a support and by rotating the support after fixing the substrate to the holder.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5335777A JPS53138278A (en) | 1977-05-10 | 1977-05-10 | Drier for wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5335777A JPS53138278A (en) | 1977-05-10 | 1977-05-10 | Drier for wafer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53138278A true JPS53138278A (en) | 1978-12-02 |
Family
ID=12940536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5335777A Pending JPS53138278A (en) | 1977-05-10 | 1977-05-10 | Drier for wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53138278A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5586116A (en) * | 1978-12-25 | 1980-06-28 | Hitachi Ltd | Drier |
JPS56118347A (en) * | 1980-02-22 | 1981-09-17 | Hitachi Ltd | Drying device |
JPS617028U (en) * | 1984-06-15 | 1986-01-16 | 黒谷 巌 | Semiconductor material draining and drying equipment |
JPS6120049U (en) * | 1984-07-11 | 1986-02-05 | 関西日本電気株式会社 | Rotary dryer for diced wafers |
-
1977
- 1977-05-10 JP JP5335777A patent/JPS53138278A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5586116A (en) * | 1978-12-25 | 1980-06-28 | Hitachi Ltd | Drier |
JPS56118347A (en) * | 1980-02-22 | 1981-09-17 | Hitachi Ltd | Drying device |
JPS617028U (en) * | 1984-06-15 | 1986-01-16 | 黒谷 巌 | Semiconductor material draining and drying equipment |
JPH051074Y2 (en) * | 1984-06-15 | 1993-01-12 | ||
JPS6120049U (en) * | 1984-07-11 | 1986-02-05 | 関西日本電気株式会社 | Rotary dryer for diced wafers |
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