JPH0510425B2 - - Google Patents

Info

Publication number
JPH0510425B2
JPH0510425B2 JP60059275A JP5927585A JPH0510425B2 JP H0510425 B2 JPH0510425 B2 JP H0510425B2 JP 60059275 A JP60059275 A JP 60059275A JP 5927585 A JP5927585 A JP 5927585A JP H0510425 B2 JPH0510425 B2 JP H0510425B2
Authority
JP
Japan
Prior art keywords
carbon
thin film
carbon deposit
dopant
hydrocarbon compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60059275A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61223186A (ja
Inventor
Yoshikazu Yoshimoto
Tomonari Suzuki
Yoshuki Togaki
Shigeo Nakajima
Toshio Inoguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP60059275A priority Critical patent/JPS61223186A/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to EP88113145A priority patent/EP0305790B1/en
Priority to EP86103833A priority patent/EP0201696B1/en
Priority to DE8686103833T priority patent/DE3678030D1/de
Priority to DE8888113145T priority patent/DE3687529T2/de
Publication of JPS61223186A publication Critical patent/JPS61223186A/ja
Priority to US07/190,353 priority patent/US4946370A/en
Priority to US07/344,961 priority patent/US5049409A/en
Priority to US07/706,006 priority patent/US5273778A/en
Publication of JPH0510425B2 publication Critical patent/JPH0510425B2/ja
Priority to US08/051,441 priority patent/US5404837A/en
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemically Coating (AREA)
  • Chemical Vapour Deposition (AREA)
JP60059275A 1985-03-20 1985-03-22 炭素薄膜の製造方法 Granted JPS61223186A (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP60059275A JPS61223186A (ja) 1985-03-22 1985-03-22 炭素薄膜の製造方法
EP88113145A EP0305790B1 (en) 1985-03-20 1986-03-20 Production of graphite intercalation compound and doped carbon films
EP86103833A EP0201696B1 (en) 1985-03-20 1986-03-20 Production of carbon films
DE8686103833T DE3678030D1 (de) 1985-03-20 1986-03-20 Herstellung von kohlenstoffschichten.
DE8888113145T DE3687529T2 (de) 1985-03-20 1986-03-20 Herstellung von graphiteinlagerungsverbindung und gedopte carbonfilme.
US07/190,353 US4946370A (en) 1985-03-20 1988-05-05 Method for the production of carbon films having an oriented graphite structure
US07/344,961 US5049409A (en) 1985-03-20 1989-04-28 Method for metal or metal compounds inserted between adjacent graphite layers
US07/706,006 US5273778A (en) 1985-03-20 1991-05-28 Method for producing graphite intercalation compound
US08/051,441 US5404837A (en) 1985-03-20 1993-04-22 Method for preparing a graphite intercalation compound having a metal or metal compounds inserted between adjacent graphite layers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60059275A JPS61223186A (ja) 1985-03-22 1985-03-22 炭素薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS61223186A JPS61223186A (ja) 1986-10-03
JPH0510425B2 true JPH0510425B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-02-09

Family

ID=13108665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60059275A Granted JPS61223186A (ja) 1985-03-20 1985-03-22 炭素薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS61223186A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4412411B2 (ja) * 2007-08-10 2010-02-10 三菱電機株式会社 炭化珪素半導体装置の製造方法
JP5220049B2 (ja) * 2010-03-09 2013-06-26 三菱電機株式会社 炭化珪素半導体装置の製造方法
JP2013028493A (ja) * 2011-07-28 2013-02-07 Sumitomo Electric Ind Ltd 黒鉛およびその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5848428A (ja) * 1981-09-17 1983-03-22 Semiconductor Energy Lab Co Ltd 炭素被膜を有する複合体およびその作製方法

Also Published As

Publication number Publication date
JPS61223186A (ja) 1986-10-03

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