DE3678030D1 - Herstellung von kohlenstoffschichten. - Google Patents

Herstellung von kohlenstoffschichten.

Info

Publication number
DE3678030D1
DE3678030D1 DE8686103833T DE3678030T DE3678030D1 DE 3678030 D1 DE3678030 D1 DE 3678030D1 DE 8686103833 T DE8686103833 T DE 8686103833T DE 3678030 T DE3678030 T DE 3678030T DE 3678030 D1 DE3678030 D1 DE 3678030D1
Authority
DE
Germany
Prior art keywords
manufacture
carbon layers
layers
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE8686103833T
Other languages
English (en)
Inventor
Yoshikasu Yoshimoto
Tomonari Suzuki
Yoshiyuki Higashigaki
Shigeo Nakajima
Toshio Inoguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60056478A external-priority patent/JPS61222989A/ja
Priority claimed from JP60059275A external-priority patent/JPS61223186A/ja
Priority claimed from JP60064572A external-priority patent/JPS61223179A/ja
Application filed by Sharp Corp filed Critical Sharp Corp
Application granted granted Critical
Publication of DE3678030D1 publication Critical patent/DE3678030D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/04—Diamond
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00—Carbon; Compounds thereof
    • C01B32/20—Graphite
    • C01B32/21—After-treatment
    • C01B32/22—Intercalation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02—Epitaxial-layer growth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
DE8686103833T 1985-03-20 1986-03-20 Herstellung von kohlenstoffschichten. Expired - Lifetime DE3678030D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP60056478A JPS61222989A (ja) 1985-03-20 1985-03-20 黒鉛構造を有する炭素薄膜の製造方法
JP60059275A JPS61223186A (ja) 1985-03-22 1985-03-22 炭素薄膜の製造方法
JP60064572A JPS61223179A (ja) 1985-03-26 1985-03-26 炭素層間化合物の合成法

Publications (1)

Publication Number Publication Date
DE3678030D1 true DE3678030D1 (de) 1991-04-18

Family

ID=27295928

Family Applications (2)

Application Number Title Priority Date Filing Date
DE8686103833T Expired - Lifetime DE3678030D1 (de) 1985-03-20 1986-03-20 Herstellung von kohlenstoffschichten.
DE8888113145T Expired - Fee Related DE3687529T2 (de) 1985-03-20 1986-03-20 Herstellung von graphiteinlagerungsverbindung und gedopte carbonfilme.

Family Applications After (1)

Application Number Title Priority Date Filing Date
DE8888113145T Expired - Fee Related DE3687529T2 (de) 1985-03-20 1986-03-20 Herstellung von graphiteinlagerungsverbindung und gedopte carbonfilme.

Country Status (3)

Country Link
US (3) US4946370A (de)
EP (2) EP0201696B1 (de)
DE (2) DE3678030D1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5273778A (en) * 1985-03-20 1993-12-28 Sharp Kabushiki Kaisha Method for producing graphite intercalation compound
US4863814A (en) * 1986-03-27 1989-09-05 Sharp Kabushiki Kaisha Electrode and a battery with the same
US4761308A (en) * 1987-06-22 1988-08-02 General Electric Company Process for the preparation of reflective pyrolytic graphite
JP2718696B2 (ja) * 1988-06-08 1998-02-25 シャープ株式会社 電 極
US5364654A (en) * 1990-06-14 1994-11-15 Idemitsu Kosan Co., Ltd. Process for production of a thin film electrode and an electroluminescence device
US5269953A (en) * 1991-07-08 1993-12-14 Whewell Christopher J Synthetic carbon allotropes: graphite intercalated with buckminsterfullerenes
GB9206552D0 (en) * 1992-03-26 1992-05-06 Epichem Ltd Bubblers
JP3044683B2 (ja) * 1995-03-17 2000-05-22 科学技術振興事業団 グラファイト層の形成方法、該方法によって形成されたグラファイト層を有するｘ線光学素子及びｘ線光学素子の製造方法
US5863467A (en) * 1996-05-03 1999-01-26 Advanced Ceramics Corporation High thermal conductivity composite and method
RU2149215C1 (ru) * 1998-07-03 2000-05-20 Государственный научно-исследовательский и проектный институт редкометаллической промышленности Способ получения слоев пироуглерода
RU2141006C1 (ru) * 1998-09-08 1999-11-10 Пыпкин Борис Николаевич Способ получения легированных углеродосодержащих покрытий
RU2209849C2 (ru) * 2001-10-16 2003-08-10 Государственный научно-исследовательский институт Научно-производственного объединения "Луч" Способ осаждения пироуглеродных покрытий на изделия в кипящем слое
EP1484800A4 (de) * 2002-03-08 2008-10-29 Matsushita Electric Works Ltd Quanten-einrichtung
CN1234604C (zh) * 2002-11-27 2006-01-04 清华大学 一种碳纳米管、其制备方法和制备装置
US7713583B2 (en) * 2002-11-27 2010-05-11 Tsinghua University Method for forming isotope-doped light element nanotube
KR100511757B1 (ko) * 2003-02-19 2005-09-01 유재수 금속산화물이 코팅된 플라즈마 디스플레이 패널용 형광체의 제조방법 및 그로 제조된 플라즈마 디스플레이 패널용 형광체
CN101636825A (zh) * 2007-03-20 2010-01-27 佳能安内华股份有限公司 衬底加热设备及衬底加热方法
CN103906706A (zh) 2011-09-09 2014-07-02 北伊利诺斯大学董事会 结晶石墨烯及制备结晶石墨烯的方法

Family Cites Families (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA750329A (en) * 1967-01-10 Chrysler Corporation Process and apparatus for obtaining metal carbide coatings on base materials and metal carbide structures produced thereby
US3172774A (en) * 1965-03-09 Method of forming composite graphite coated article
US2057431A (en) * 1933-03-29 1936-10-13 Raymond H Hobrock Method of making resistance elements
US2356956A (en) * 1942-01-01 1944-08-29 Bell Telephone Labor Inc Process of carbonizing
US2392682A (en) * 1943-01-11 1946-01-08 Little Inc A Process for decreasing the permeability of fabricated carbon shapes
US2719779A (en) * 1950-01-11 1955-10-04 Cabot Godfrey L Inc Process of making hard carbon black pellets
US2901381A (en) * 1956-10-12 1959-08-25 Bell Telephone Labor Inc Method of making electrical resistors
US2922722A (en) * 1956-11-30 1960-01-26 Hutcheon John Malcolm Method of producing a carbon body of increased density
US3138435A (en) * 1961-06-26 1964-06-23 Gen Electric Deposition apparatus and method for forming a pyrolytic graphite article
GB967565A (en) * 1961-07-17 1964-08-26 High Temperature Materials Inc Alloys containing pyrolytic graphite
FR1318796A (fr) * 1962-01-12 1963-02-22 Lorraine Carbone Pièces de forme revêtues de graphite pyrolytique
US3464843A (en) * 1962-03-21 1969-09-02 Union Carbide Corp Pyrolytic graphite alloys and method of making the same
GB1045591A (en) * 1963-04-25 1966-10-12 Atomic Energy Authority Uk Improvements in or relating to coating of particles
US3317338A (en) * 1964-01-07 1967-05-02 James D Batchelor Pyrolytic graphite coating process
DE1297080B (de) * 1964-02-21 1969-06-12 Siemens Ag Verfahren zum Herstellen duenner Schichten aus metallischen und/oder halbleitenden Stoffen auf einem Traeger
US3379555A (en) * 1964-05-01 1968-04-23 Air Force Usa Vapor deposition of pyrolytic graphite on tungsten
US3369920A (en) * 1964-11-24 1968-02-20 Union Carbide Corp Process for producing coatings on carbon and graphite filaments
US3721577A (en) * 1966-09-23 1973-03-20 Teeg Research Inc Process for the deposition of refractory metal and metalloid carbides on a base material
FR1517329A (fr) * 1967-03-31 1968-03-15 Ducommun Inc Matériaux complexes renforcés de revêtements pyrolytiques
US3549847A (en) * 1967-04-18 1970-12-22 Gen Electric Graphite susceptor
US3630678A (en) * 1968-06-26 1971-12-28 Univ Case Western Reserve Diamond growth process
US3630679A (en) * 1968-06-26 1971-12-28 Univ Case Western Reserve Diamond growth process
SE332328B (de) * 1969-02-21 1971-02-01 Sandvikens Jernverks Ab
US3677795A (en) * 1969-05-01 1972-07-18 Gulf Oil Corp Method of making a prosthetic device
US3642522A (en) * 1969-07-15 1972-02-15 Suisse Horlogerie Rech Lab Method for producing hard coatings on a surface
US3725110A (en) * 1969-11-13 1973-04-03 Ducommun Inc Process of coating articles with pyrolytic graphite and coated articles made in accordance with the process
US3949106A (en) * 1969-12-29 1976-04-06 Toyo Boseki Kabushiki Kaisha Method for producing isotropic pyrolisis carbon coatings
GB1326769A (en) * 1970-10-08 1973-08-15 Fulmer Res Inst Ltd Formulation of tungsten and molybdenum carbides
US3969130A (en) * 1973-02-05 1976-07-13 General Atomic Company Carbon-coated articles and method of making same
US3995143A (en) * 1974-10-08 1976-11-30 Universal Oil Products Company Monolithic honeycomb form electric heating device
US4136213A (en) * 1975-10-16 1979-01-23 Exxon Research & Engineering Co. Carbon article including electrodes and methods of making the same
GB1582231A (en) * 1976-08-13 1981-01-07 Nat Res Dev Application of a layer of carbonaceous material to a surface
US4241104A (en) * 1978-10-16 1980-12-23 The Fluorocarbon Company Process for bonding carbon substrates using particles of a thermally stable solid
FR2516914B1 (fr) * 1981-11-26 1986-03-14 Commissariat Energie Atomique Procede de densification d'une structure poreuse
US4434188A (en) * 1981-12-17 1984-02-28 National Institute For Researches In Inorganic Materials Method for synthesizing diamond
FR2542653B1 (fr) * 1983-03-14 1987-02-20 Gavelle Dominique Taraud a goujure convexe
US4701317A (en) * 1983-06-14 1987-10-20 Director-General Of Agency Of Industrial Science And Technology Highly electroconductive films and process for preparing same
EP0142176A1 (de) * 1983-10-24 1985-05-22 George Gergely Merkl Kubischer Kohlenstoff
JPS60238480A (ja) * 1984-05-10 1985-11-27 Nikkiso Co Ltd 炭素繊維強化金属の製造方法
US4490229A (en) * 1984-07-09 1984-12-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Deposition of diamondlike carbon films
JPH0725636B2 (ja) * 1986-01-23 1995-03-22 株式会社東芝 半導体ダイヤモンドの製造方法
JPS63170395A (ja) * 1986-07-12 1988-07-14 Takeda Chem Ind Ltd 抗生物質ｔａｎ−９３０およびその製造法

Also Published As

Publication number Publication date
EP0201696B1 (de) 1991-03-13
DE3687529T2 (de) 1993-05-13
EP0201696A2 (de) 1986-11-20
US4946370A (en) 1990-08-07
US5049409A (en) 1991-09-17
US5404837A (en) 1995-04-11
EP0305790A1 (de) 1989-03-08
EP0201696A3 (en) 1987-02-04
EP0305790B1 (de) 1993-01-13
DE3687529D1 (de) 1993-02-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee